Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Feasibility Evaluation of Micro Hole Drilling and the Material Properties of Si3N4/hBN Ceramic with hBN Contents

hBN의 첨가량에 따른 Si3N4/hBN 세라믹의 재료특성 및 마이크로 홀가공 유용성 평가

  • 박귀득 ((재)경남테크노파크 지능기계소재부품센터) ;
  • 고건호 ((주)삼기오토모티브 선행개발팀) ;
  • 이동진 (부산대학교 융합학부) ;
  • 김진형 (부산대학교 융합학부) ;
  • 강명창 (부산대학교 융합학부)
  • Received : 2016.12.27
  • Accepted : 2017.01.17
  • Published : 2017.02.28
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Abstract

In this paper, $Si_3N_4/hBN$ ceramics with various hexagonal boron nitride (hBN) contents (0, 10, 20, or 30 wt%) were fabricated via spark plasma sintering (SPS) at $1500^{\circ}C$, 50MPa, and 10m holding time. The material properties such as the relative density, hardness, and fracture toughness were systematically evaluated according to the hBN content in the $Si_3N_4/hBN$ ceramics. The results show that relative density, hardness, and fracture toughness continuously decreased as the hBN content increased. In addition, peak-step drilling (with tool diameter $500{\mu}m$) was performed to observe the effects of hBN content in micro-hole shape and cutting force. A machined hole diameter of $510{\mu}m$ (entrance) and stable cutting force were obtained at 30 wt% hBN content. Consequently, $Si_3N_4/30wt%$ hBN ceramic is a feasible material upon which to apply semi-conductor components, and this study is very meaningful for determining correlations between material properties and machining performance.

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References

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