참고문헌
- "Technology Roadmap for SME 2017-2019." Small and Medium Business Administration, (2016).
- Sah, Chih-Tang, Robert N Noyce, and William Shockley. "Carrier Generation and Recombination in Pn Junctions and Pn Junction Characteristics." Proceedings of the IRE 45, No. 9 (1957): 1228-43. https://doi.org/10.1109/JRPROC.1957.278528
- Jones, Scotten W. "Diffusion in Silicon." IC Knowledge LLC (2008).
- Kadhim, MAH, and B Tuck. "On Solid-State Diffusion from a Limited Source." Physica Status Solidi (a) 58, no. 1 (1980): 303-10. https://doi.org/10.1002/pssa.2210580138
- Mayer, James Walter, John Arthur Davies, and Lennart Eriksson. Ion Implantation in Semiconductors. Acad. Press New York, 1970.
- Mizuno, B., et al. "Plasma doping for silicon." Surface and Coatings Technology 85.1-2 (1996): 51-55. https://doi.org/10.1016/0257-8972(96)02881-2
- Klaassen, DBM. "A Unified Mobility Model for Device Simulation-I. Model Equations and Concentration Dependence." Solid-State Electronics 35, no. 7 (1992): 953-59 https://doi.org/10.1016/0038-1101(92)90325-7
- Myoung Soo Yun, Tae Hun Jo, Sang-Hyuk Hwang, In Tae Kim, Eun Ha Choi, Guangsup Cho1, and Gi-Chung Kwon, "The Selective Emitter Doping of P-Type Solar Cells Using Atmospheric Pressure Plasma Jet," J. of Nanoscience and Nanotechnology, Vol. 16, No. 10, pp.10711-10715 https://doi.org/10.1166/jnn.2016.13224
- Sang Hun Kim, et al. "Study of the Diffusion of Phosphorus Dependent on Temperatures for Selective Emitter Doping Process of Atmospheric Pressure Plasma," The Korean Institute of Surface Engineering 47.5 (2014): 227-232. https://doi.org/10.5695/JKISE.2014.47.5.227
- H. K. Lim, et al. "Characteristics of Plasma Plume with a Cylindrical Syringe Plasma Jet Device," Applied Science and Convergence Technology 20.1 (2011): 14-21. https://doi.org/10.5757/JKVS.2011.20.1.014