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Correlation between a Structural Change and a Thermoelectric Performance of a Glassy Carbon Thin Film Induced by Electron Beam Irradiation

전자빔 조사에 의한 유리상 탄소에서의 구조적 변화와 열전 성능의 상관관계

  • Oh, Inseon (School of Materials Science and Engineering, Ulsan National Institute of Science and Technology) ;
  • Jo, Junhyeon (School of Materials Science and Engineering, Ulsan National Institute of Science and Technology) ;
  • An, Ki-Seok (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Yoo, Jung-woo (School of Materials Science and Engineering, Ulsan National Institute of Science and Technology)
  • Received : 2016.08.16
  • Accepted : 2016.08.30
  • Published : 2016.08.31

Abstract

Glassy carbon can be utilized in a variety of harsh environment due to exceptional thermal stability and chemically impermeability along with scalability and low electrical resistance. In this work, we studied effects of electron(e)-beam irradiation on thermoelectric properties of the glassy carbon film. E-beam irradiation triggered local crystallization and/or amorphization of glassy carbon thin films, which was determined by a Raman spectroscopy. The structural change by e-beam irradiation leads to the change in the doping level of the glassy carbon, which can be inferred from the change of a Seebeck coefficient and an electric conductivity. The optimal power factor we obtained for the irradiated glassy carbon film was ~200% higher than that of the non-irradiated sample.

유리상 탄소는 열적으로 안정하고, 화학적 반응성이 매우 낮으며, 다양한 크기로 제작이 가능하고, 전기적 저항 또한 낮아서 다양한 극한 환경에서 사용 가능하다. 이 논문에서는 전자빔 조사가 유리상 탄소 박막의 구조 변화에 미치는 영향과 그에 따른 열전효과 변화에 대해 연구하였다. 라만 분광 특성 분석을 바탕으로 유리상 탄소 박막에 전자빔 조사에 따라 결정화 또는 비정질화가 일어나는 것을 확인하였다. 또한, 이러한 결정변화가 유리상 탄소 박막의 자유전자 도핑 농도의 변화시키며 그에 따른 제백 상수나 전기적 전도도의 변화도 확인하였다. 전자빔 조사로 인하여 유리상 탄소의 열전파워 펙터가 최대 200%까지 향상되는 것을 보여 주었다.

Keywords

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