Journal of Korean Society of Occupational and Environmental Hygiene (한국산업보건학회지)

Korean Industrial Hygiene Association (한국산업보건학회)
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Reliability Analysis of Material Safety Data Sheets(MSDS) for Photoresist Chemicals used in some Semiconductor Factories

일부 반도체 사업장 포토레지스트 화학물질 MSDS 정보의 신뢰성 분석

  • 이경화 (을지대학교 보건환경안전학과) ;
  • 이석용 (SK하이닉스 주식회사 SHE 보건팀) ;
  • 최윤지 (SK하이닉스 주식회사 SHE 보건팀) ;
  • 최한영 (을지대학교 보건환경안전학과)
  • Received : 2016.12.15
  • Accepted : 2016.12.27
  • Published : 2016.12.31
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Abstract

Objectives: This study aimed to examine and analyze the material safety data sheet(MSDS) information for photoresist chemicals used in certain processes in semiconductor plants. Methods: After collecting MSDS for 178 chemical products currently used in certain processes in semiconductor plants, we analyzed Sections 2, 3, 11, and 15 of each MSDS with reference to the guidelines for evaluating the reliability of MSDS provided by the Korea Occupational Safety and Health Agency. In addition, we reviewed the recorded uses and the ratios of trade secrets. Results and Conclusions: We studied a total of 178 chemical products. An MSDS was available for 176(98.9%) of them and all adhered to the Globally Harmonized System(GHS) regulations. There were 37 cases of errors in Hazard Identification, pertaining to 20.8% of all products surveyed. There were 64 cases of errors in the current legal circumstances, pertaining to 36.0% of all products. There were a total of 407 trade secrets across 52.2% of products. We believe that a government-led education and certification system needs to be introduced to improve the transfer of MSDS information. The government, chemical manufacturers and suppliers all need to make an effort to produce reliable MSDS.

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