Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Modelling and Measurements of Normal and Lateral Stiffness for Atomic Force Microscopy

  • Choi, Jinnil (Department of Mechanical Engineering, Hanbat National University)
  • Received : 2014.09.11
  • Accepted : 2014.09.30
  • Published : 2014.09.30
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Abstract

Modelling and measurements of normal and lateral stiffness for atomic force microscopy (AFM) are presented in this work. Important issues, such as element discretisation, stiffness calibration, and deflection angle are explored using the finite element (FE) model. Elements with various dimension ratios are investigated and comparisons with several mathematical models are reported to verify the accuracy of the model. Investigation of the deflection angle of a cantilever is also shown. Moreover, AFM force measurement experiments with conical and colloid probe tips are demonstrated. The relationships between force and displacement, required for stiffness measurement, in normal and lateral directions are acquired for the conical tip and the limitations of the colloid probe tip are highlighted.

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