Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of Rotational Nanoactuator Based on Four-Bar Linkage

4절링크 기구기반의 회전형 초정밀위치결정기구의 개발

  • Received : 2014.07.21
  • Accepted : 2014.07.30
  • Published : 2014.08.15
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Abstract

Ultra-precision positioning plays a crucial role in emerging technologies such as electronics, bioengineering, optics, and various nanofabrication technologies. As a result, various nanopositioning methods have been presented. In particular, nanopositioning using a flexure mechanism and piezo-electric actuator is one of the most valuable methods because of its friction-free motion and subnanometer-scale motion resolution. In this study, a rotational nanoactuator based on a right-circular flexure mechanism and piezo-electric actuator was developed through a consideration of the kinematics and structural deformation. An experimental setup was constructed to verify the performance expectation. Consequently, it was demonstrated that the developed system had a maximum rotational angle of about 0.01 rad, as well as sufficient linearity with respect to the input voltage.

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References

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