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Fabrication and Characterization of AAO Template with Variation of the Phosphoric Acid Amount of the Etching Solution

에칭용액의 인산 첨가량에 따른 양극산화 알루미늄 템플레이트의 제작 및 특성

  • Jo, Ye-Won (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Kim, Yong-Jun (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Yeo, Jin-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Lee, Sung-Gap (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Kim, Young-Gon (Department of Photoelectronics, Chosun College of Science & Technology)
  • 조예원 (경상대학교 세라믹공학과) ;
  • 김용준 (경상대학교 세라믹공학과) ;
  • 여진호 (경상대학교 세라믹공학과) ;
  • 이성갑 (경상대학교 세라믹공학과) ;
  • 김영곤 (조선이공대학교 광전자과)
  • Received : 2013.07.26
  • Accepted : 2014.06.13
  • Published : 2014.07.01

Abstract

Anodic aluminum oxides (AAO) fabricated by the two-step anodizing process have attracted much attention for the fabrication of nano template because of pore structure with high aspect ratio, low cost process and ease of fabrication. AAOs are characterized by a homogeneous morphology of parallel pores that grow perpendicular to the template surface with a narrow distribution of diameter, length and inter-pores spacing, all of which can be easily controlled by suitably choosing of the anodizing parameters such as pH of the electrolyte, anodizing voltage and duration of anodizing. In this study, AAO templates were characterized by X-ray diffraction and field-emission scanning electron microscope (FE-SEM). The dependence of the pore size change according to the amount of addition of phosphoric acid, which was used to remove the initial alumina oxide layer, was not observed.

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References

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