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Application of Smart Isolation Platform for Microvibration Control of High-Tech Industry Facilities

첨단기술산업 시설물의 미진동제어를 위한 스마트 면진플랫폼의 적용

  • Kim, Hyun-Su (Division of Architecture, Sunmoon University) ;
  • Kang, Joo-Won (School of Architecture, Yeungnam Universtiy) ;
  • Kim, Young-Sik (Dept. of Architecture & Interior Design, Taegu Science University)
  • Received : 2014.05.09
  • Accepted : 2014.05.27
  • Published : 2014.06.15

Abstract

In this study, a smart isolation platform has been developed for control of microvibration of high-technology facilities, such as semi-conductor plants and TFT-LCD plants. Previously, microvibration control performance of a smart base isolation system has been investigated. This study compared microvibration control performance of a smart isolation platform with that of conventional base isolation and fixed base. For this purpose, train-induced ground acceleration is used for time history analysis. An MR damper was used to compose a smart isolation platform. A fuzzy logic controller was used as a control algorithm and it was optimized by a multi-objective genetic algorithm. Numerical analysis shows that a smart isolation platform can effectively control microvibration of a high-technology facility subjected to train-induced excitation compared with other models.

Keywords

References

  1. Lee, H.K., Pak, J.H., Won, Y.J., Park, H.D. and Kim, D.H., "A study on the structural dynamic design for sub-micro vibration control in high class semiconductor factory by semi-empirical method", Journal of the Korean Society for Noise and Vibration Engineering, Vol. 9, No. 6, 1999, pp.1227-1233.
  2. Xu, Y.L., Tang, Z.C., Chen, J., Liu, H.J. and Chen, J., "Microvibration control platform for high technology facilities subject to traffic-induced ground motion", Engineering Structures, Vol. 25, 2003, pp.1069-1082. https://doi.org/10.1016/S0141-0296(03)00049-X
  3. Yang, J.N. and Agrawal, A.K., "Protective systems for high-technology facilities against microvibration and earthquake", Journal of Structural Engineering and Mechanics, Vol. 10, No. 6, 2000, pp.561-567. https://doi.org/10.12989/sem.2000.10.6.561
  4. Spencer, B.F.Jr., Johnson, E.A. and Ramallo, J.C., "Smart isolation for seismic control", JSME Int. J. Ser. C., Vol. 43, No. 4, 2000, pp. 704-711. https://doi.org/10.1299/jsmec.43.704
  5. Bani-Hani, K.A. and Sheban, M.A., "Semiactive neuro-control for base-isolation system using magnetorheological (MR) dampers", Earthquake Engng Struct. Dyn., Vol. 35, 2006, pp.1119-1144 https://doi.org/10.1002/eqe.574
  6. Kim, H.S., Kang, J.W. and Kim, Y.S., "Microvibration control of high technology facilities subjected to train-induced excitation using smart base isolation", Journal of the Korean Association for Spacial Structures, Vol. 12, No. 2, 2012, pp.99-108. https://doi.org/10.9712/KASS.2012.12.2.099
  7. Mamdani, E.H. and Assilian, S., "An experiment in linguistic synthesis with a fuzzy logic controller", International Journal of Man-Machine Studies, Vol. 7, No. 1., 1975, pp.1-13. https://doi.org/10.1016/S0020-7373(75)80002-2
  8. Deb, K., Pratap, A., Agrawal, S. and Meyarivan, T., "A fast elitist non-dominated sorting genetic algorithm for multi-objective optimization: NSGA-II", Technical Report No. 200001, Kanpur: Indian Institute of Technology Kanpur, India, 2000.
  9. Kang, J.W., Kim, H.S. and Lim, J.H., "Multi-objective fuzzy control of a spacial structure using smart base isolation system", Journal of the Korean Association for Spacial Structures, Vol. 11, No. 2, 2011, pp.89-99.
  10. Wen, Y.K., "Method of Random Vibration of Hysteretic Systems", J. Engng. Mech. Division, Proceedings, ASCE, 102, 1976, pp. 249-263.
  11. Gordon, C.G., "Generic criteria for vibration sensitive equipment", Proceedings of SPIE, 1991, pp.71-85.

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