Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지
DOI QR코드

DOI QR Code

Electrical Properties of ITO Thin Film Deposited by Reactive DC Magnetron Sputtering using Various Sn Concentration Target

반응성 DC 마그네트론 스퍼터링법으로 증착한 ITO 박막의 전기적 특성 평가

  • Kim, Min-Je (Department of Material Science and Engineering, Pusan National University) ;
  • Jung, Jae-Heon (Department of Material Science and Engineering, Pusan National University) ;
  • Song, Pung-Keun (Department of Material Science and Engineering, Pusan National University)
  • Received : 2014.10.27
  • Accepted : 2014.12.02
  • Published : 2014.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

Indium tin oxide (ITO) thin films (30 nm) were deposited on PET substrate by reactive DC magnetron sputtering using In/Sn(2, 5 wt.%) metal alloy target without intentionally substrate heating during the deposition under different DC powers of 70 ~ 110 W. The electrical properties were estimated by Hall-effect measurements system. The resistivity of ITO thin film deposited using In/Sn (5 wt.%) metal alloy target at low DC power increased with increasing annealing time. However, they increased with increasing annealing time at high DC power. In the case of ITO (Sn 2 wt%), we can't find clear change in resistivity with increasing annealing time. However, carrier density and mobility showed difference behavior due to change of oxygen vacancy.

Keywords

References

  1. Y. S. Park, S.H. Lee, P.K. Song, J. Kor. Inst. Sur. Eng., 40 (2007), 107. https://doi.org/10.5695/JKISE.2007.40.3.107
  2. J.H. Jung, S. H. Cho, P. K. Song, J. Kor. Inst. Sur. Eng., 46 (2013) 16. https://doi.org/10.5695/JKISE.2013.46.1.016
  3. J. H. Kim, C. G. Kang, Y. T. Kim, W. S. Cheong, P. K. Song, J. Nanosci. Nanotechnol, 13 (2012) 1.
  4. S. Honda, M. Watamori, K. Oura, Thin Soild Films, 281 (1996) 206.
  5. C. MENG, B. Xuedong, G. Jun, S. Chao, H. Rongfang, W. Lishi, J. Mater. Sci. Technol., 16 (2000) 281.
  6. S. W. Kang, H. J. Lee, S. H. Cho, W. S. Cheong, G. H. Lee, P. K. Song, J. Nanoelectron. Optoelectron., 7 (2012) 494. https://doi.org/10.1166/jno.2012.1375
  7. S. W. Kang, S. H. Cho, W. S. Cheong, G. H. Lee, P. K. Song, J. Nanoelectron. Optoelectron., 9 (2014) 1. https://doi.org/10.1166/jno.2014.1539
  8. A. S. A. C Diniz, Renewable Energy., 36 (2011) 1153. https://doi.org/10.1016/j.renene.2010.09.005
  9. N. Oka, Y. Kawase, Y. Shigesato, Thin Solid Films., 520 (2012) 4101. https://doi.org/10.1016/j.tsf.2011.06.063