Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
권호 표지
DOI QR코드

DOI QR Code

Optical properties of vanadium dioxide thin films on c-Al2O3 (001) substrates by in-situ RF magnetron sputtering

  • Han, Seung Ho (Electronic Materials & Device Research Center, Korea Electronics Technology Institute) ;
  • Kang, So Hee (Electronic Materials & Device Research Center, Korea Electronics Technology Institute) ;
  • Kim, Hyeongkeun (Electronic Materials & Device Research Center, Korea Electronics Technology Institute) ;
  • Yoon, Dae Ho (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Yang, Woo Seok (Electronic Materials & Device Research Center, Korea Electronics Technology Institute)
  • Received : 2013.09.02
  • Accepted : 2013.10.18
  • Published : 2013.10.31
Download PDF
⟨ Previous Next ⟩

Abstract

Vanadium oxide thin films were deposited on $c-Al_2O_3$ (001) substrate by in-situ RF magnetron sputtering. Oxygen partial pressure was adjusted to prepare thermochromic $VO_2$ phase. X-ray diffraction patterns and scanning electron microscopy convincingly showed that plate-like $V_2O_5$ grains were changed into round-shape $VO_2$ grains as oxygen partial pressure decreased. After the optimized deposition conditions were fixed, the effect of substrate temperature and orientation on the optical properties of $VO_2$ thin films was analyzed.

Keywords

References

  1. C.G. Granqvist, "Materials science for solar energy conversion systems", (Pergamon Press, Oxford, 1991) Chap. 5.
  2. F.J. Morin, "Oxides which show a metal-to-insulator transition at the Neel temperature", Phys. Rev. Lett. 3 (1959) 34. https://doi.org/10.1103/PhysRevLett.3.34
  3. J.B. Goodenough, "The two compounds of the crystallographic transition in $VO_2$", J. Solid State Chem. 3 (1971) 490. https://doi.org/10.1016/0022-4596(71)90091-0
  4. D.H. Kim and H.S. Kwok, "Pulsed laser deposition of $VO_2$ thin films", Appl. Phys. Lett. 65 (1994) 3188. https://doi.org/10.1063/1.112476
  5. Y. Muraoka and Z. Hiroi, "Metal-insulator transition of $VO_2$ thin films grown on $TiO_2$ (001) and (110) substrates", Appl. Phys. Lett. 80 (2002) 583. https://doi.org/10.1063/1.1446215
  6. K. Okimura, J. Sakai and S. Ramanathan, "In situ x-ray diffraction studies on epitaxial $VO_2$ films grown on c- $Al_2O_3$ during thermally induced insulator-metal transition", J. Appl. Phys. 107 (2010) 063503. https://doi.org/10.1063/1.3327422
  7. H.-T. Kim, Y.W. Lee, B.-J. Kim, B.-G. Chae, S.J. Yun, K.-Y. Kang, K.-J. Han, K.-J. Yee and Y.-S. Lim, "Monoclinic and correlated metal phase in $VO_2$ as evidence of the Mott transition: coherent phonon analysis", Phys. Rev. Lett. 97 (2006) 266401. https://doi.org/10.1103/PhysRevLett.97.266401
  8. B.-J. Kim, Y.W. Lee, B.-G. Chae, S.J. Yun, S.-Y. Oh and H.-T. Kim, "Temperature dependence of the first-order metal-insulator transition in $VO_2$ and programmable critical temperature sensor", Appl. Phys. Lett. 90 (2007) 023515. https://doi.org/10.1063/1.2431456
  9. U. Qureshi, T.D. Manning and I.P. Parkin, "Atmospheric pressure chemical vapour deposition of $VO_2$ and $VO_2$/$TiO_2$ films from the reaction of $VOCl_3$, $TiCl_4$ and water", J. Mater. Chem. 14 (2004) 1190. https://doi.org/10.1039/b316531k
  10. R. Binions, G. Hyett, C. Piccirillo and I.P. Parkin, "Synthesis and terahertz transmission properties of nanoporous vanadium dioxide films", J. Mater. Chem. 17 (2007) 4652. https://doi.org/10.1039/b708856f
  11. G. Xu, P. Jin, M. Tazawa and K. Yoshimura, "$VO_2$- Sb:$SnO_2$ composite thermochromic smart glass foil", Appl. Surf. Sci. 244 (2005) 449. https://doi.org/10.1016/j.apsusc.2004.09.157
  12. H. Kakiuchida, P. Jin, S. Nakao and M. Tazawa, "Optical properties of vanadium dioxide film during semiconductive- metallic phase transition", Jpn. J. Appl. Phys. 46 (2007) L113. https://doi.org/10.1143/JJAP.46.L113
  13. Z. Yang and S. Ramanathan, "Direct measurement of compositional complexity-induced electronic inhomogeneity in $VO_2$ thin films grown on gate dielectrics", Appl. Phys. Lett. 98 (2011) 192113. https://doi.org/10.1063/1.3590920
  14. C.H. Griffiths and H.K. Eastwood, "Influence on stoichiometry on the metal-semiconductor transition in vanadium dioxide", J. Appl. Phys. 45 (1974) 2201. https://doi.org/10.1063/1.1663568
  15. P. Jin, K. Yoshimura and S. Tanemura, "Dependence of microstructure and thermochromism on substrate temperature for sputter-deposited $VO_2$ epitaxial films", J. Vac. Sci. Technol. A. 15 [3] (1997) 1113. https://doi.org/10.1116/1.580439
  16. J. Lappalainen, S. Heinilehto, S. Saukko, V. Lantto and H. Jantunen, "Microstructure dependent switching properties of $VO_2$ thin films", Sens. Actuators A 142 (2008) 250. https://doi.org/10.1016/j.sna.2007.05.002
  17. K. Okimura and Y. Suzuki, "Epitaxial growth of $V_2O_3$thin films on c-plane $Al_2O_3$ in reactive sputtering and its transformation to $VO_2$ films by post annealing", Jpn. J. Appl. Phys. 50 (2011) 065803. https://doi.org/10.7567/JJAP.50.065803
  18. C.W. Zou, X.D. Yan, D.A. Patterson, E.A.C. Emanuelsson, J.M. Bian and W. Gao, "Temperature sensitive crystallization of $V_2O_5$: from amorphous film to ${\beta}$>-$V_2O_5$ nanorods", Cryst. Eng. Comm. 12 (2010) 691. https://doi.org/10.1039/b916614a
  19. N. Fateh, G.A. Fontalvo, L. Cha, T. Klunsner, G. Hlawacek, C. Teichert and C. Mitterer, "Synthesis-structure relations for reactive magnetron sputtered $V_2O_5$ films", Surf. Coat. Technol. 202 (2008) 1551. https://doi.org/10.1016/j.surfcoat.2007.07.010
  20. P. Singh and D. Kaur, "Influence of film thickness on texture and electrical and optical properties of room temperature deposited nanocrystalline $V_2O_5$ thin films", J. Appl. Phys. 103 (2008) 043507. https://doi.org/10.1063/1.2844438
  21. B.D. Cullity, "Elements of X-ray diffraction" (Addison- Wesley, Reading, MA, 1978).
  22. Y. Muraoka, Y. Ueda and Z. Hiroi, "Large modification of the metal-insulator transition temperature in strained $VO_2$ films grown on $TiO_2$ substrates", J. Phys. Chem. Solids 63 (2002) 965. https://doi.org/10.1016/S0022-3697(02)00098-7
  23. L.A. Ladd and W. Paul, "Optical and transport properties of high quality crystals of $V_2O_4$ near the metallic transition temperature", Solid State Commun. 7 (1969) 425. https://doi.org/10.1016/0038-1098(69)90888-6