Transactions on Electrical and Electronic Materials

  • 제14권4호
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  • Pages.203-207
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  • 2013
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Chemical HF Treatment for Rear Surface Passivation of Crystalline Silicon Solar Cells

  • Choi, Jeong-Ho (Department of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Roh, Si-Cheol (Department of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Jung, Jong-Dae (Department of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Seo, Hwa-Il (Department of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education)
  • 투고 : 2013.02.18
  • 심사 : 2013.05.21
  • 발행 : 2013.08.25
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초록

P-type Si wafers were dipped in HF solution. The minority carrier lifetime (lifetime) increased after HF treatment due to the hydrogen termination effect. To investigate the film passivation effect, PECVD was used to deposit $SiN_x$ on both HF-treated and untreated wafers. $SiN_x$ generally helped to improve the lifetime. A thermal process at $850^{\circ}C$ reduced the lifetime of all wafers because of the dehydrogenation at high temperature. However, the HF-treated wafers showed better lifetime than untreated wafers. PERCs both passivated and not passivated by HF treatment were fabricated on the rear side, and their characteristics were measured. The short-circuit current density and the open-circuit voltage were improved due to the effectively increased lifetime by HF treatment.

키워드

참고문헌

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피인용 문헌

  1. Surface passivation of boron emitters on n-type c-Si solar cells using silicon dioxide and a PECVD silicon oxynitride stack vol.6, pp.74, 2016, https://doi.org/10.1039/C6RA11043F
  2. Laser Fired Local Back Contact C-Si Solar Cells Using Phosphoric Acid for Back Surface Field vol.44, pp.4, 2015, https://doi.org/10.1007/s11664-015-3652-5
  3. Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition vol.2014, 2014, https://doi.org/10.1155/2014/795152