References
- Trimmer, W. S. N., "Microrobots and Micro mechanical Systems," Sensor. Actuator., Vol. 19, pp. 267-287, 1989. https://doi.org/10.1016/0250-6874(89)87079-9
- Carlo, M. and Metin, S., "A Biomimetic Climbing Robot Based on the Gecko," J. Bionic Eng., Vol. 3, No. 3, pp. 115-125, 2006. https://doi.org/10.1016/S1672-6529(06)60015-2
- Akiyama, T., Collard. D., and Fujita, H., "Scratch Drive Actuator with Mechanical Links for Selfassembly of Three-dimensional MEMS," J. Microelectromech. S., Vol. 6, No. 1, pp. 10-17, 1997. https://doi.org/10.1109/84.557525
- Kim, S. H., Asay, D. B., and Dugger, M. T., "Nanotribology and MEMS," Nano Today, Vol. 2, No. 5, pp. 22-29, 2007.
- Kim, H. J. and Kim, D. E., "Nano-scale Friction : a Review," Int. J. Precis. Eng. Manuf., Vol. 10, No. 2, pp. 141-151, 2009.
- Kim, H. J., Yoo, S. S., and Kim, D. E., "Nano-scale Wear : a Review," Int. J. Precis. Eng. Manuf., Vol. 13, No. 9, pp. 1709-1718, 2012. https://doi.org/10.1007/s12541-012-0224-y
- Yang, J. C. and Kim, D. E., "Tribological Characteristics of FDTS & OTS SAM according to Annealing Temperature," J. Korean Soc. Precis. Eng., Vol. 20, No. 1, pp. 240-247, 2003.
- Sung, I. H., Yang, J. C., Kim, D. E., and Shin, B. S., "Micro/nano-tribological Characteristics of Selfassembled Monolayer and Its Application in Nanostructure Fabrication," Wear, Vol. 255, No. 7-12, pp. 808-818, 2003. https://doi.org/10.1016/S0043-1648(03)00058-9
- Asy, D. B., Dugger, M. T., and Kim, S. H., "In-situ Vapor-Phase Lubrication of MEMS," Tribol. Lett., Vol. 29, No. 1, pp. 67-74, 2008. https://doi.org/10.1007/s11249-007-9283-0
- Ashurst, W. R., Carraro, C., and Maboudian, R., "Vapor Phase Anti-Stiction Coatings for MEMS," IEEE T. Device Mat. Re., Vol. 3, No. 4, pp. 173-178, 2003. https://doi.org/10.1109/TDMR.2003.821540
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