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Optimizing of Diffusion Condition in Spin on Doping for c-Si Solar Cell

스핀 도핑을 이용한 단결정 실리콘 태양전지 확산 공정 최적화

  • Yeo, In Hwan (Department of Electronic Engineering, Korea National University of Transportation) ;
  • Park, Ju Eok (Department of Electronic Engineering, Korea National University of Transportation) ;
  • Kim, Jun Hee (Department of Electronic Engineering, Korea National University of Transportation) ;
  • Cho, Hae Sung (Department of Electronic Engineering, Korea National University of Transportation) ;
  • Lim, Donggun (Department of Electronic Engineering, Korea National University of Transportation)
  • 여인환 (한국교통대학교 전자공학과) ;
  • 박주억 (한국교통대학교 전자공학과) ;
  • 김준희 (한국교통대학교 전자공학과) ;
  • 조해성 (한국교통대학교 전자공학과) ;
  • 임동건 (한국교통대학교 전자공학과)
  • Received : 2013.02.28
  • Accepted : 2013.04.24
  • Published : 2013.05.01

Abstract

Rapid thermal processing (RTP) abruptly decreases the time required to perform solar cell processes. RTP were used to form emitter of crystalline silicon solar cells. The emitter sheet resistance is studied as a function of time and temperature. The objective of this study is reduction of doping process time with same performance. Emitter difRapid thermal dfusion was carried out by using a spin on doping and a RTP. iffusion was performed in the temperature range of $700{\sim}750^{\circ}C$ for 1m 30s~15 m. Thermal budgets yielded a $50{\Omega}/sq$ emitter using a P509 source. To reduce process time and get high efficiency, rapid thermal diffusion by IR lamp was employed in air atmosphere at $700^{\circ}C$ for 15 m.

Keywords

References

  1. R. R. King, R. A. Sinton, R. M. Swanson, Trans. Electron Dev., 37, 365 (1990). https://doi.org/10.1109/16.46368
  2. A. Cuevas and M. Balbuena, 20th Photovoltaic Specialists Conference (Las Vegas, U.S.A., 1988) p. 429.
  3. B. Bazer-Bachi, E. Fourmond, P. Papet, L. Bounaas, O. Nichiporuk, N. Le Quang, and M. Lemiti, Solar Energy Materials and Solar Cells, 105, 137 (2012). https://doi.org/10.1016/j.solmat.2012.06.007
  4. J. Knobloch, S. Glunz, D. Biro, W. Warta, E. Shaffer, and W. Wettling, 25th IEEE Photovoltaic Specialicsts Conference (Washington, U.S.A., 1996) p. 377.
  5. Metz A Hezel R. 11th International Photovoltaic Science and Engineering Conference (Sapporo, Japan, 1999) p. 587.
  6. B. J. Oh, I. H. Yeo, and D. G. Lim, J. KIEEME, 258, 236 (2012).

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