Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Characterization of the Crystallized ITO Thin Films Grown at Different Temperatures by Off-axis RF Magnetron Sputtering

유연성 기판 위에 증착된 ITO 박막의 공정 온도에 따른 전기적·광학적 특성 평가

  • Choi, Hyung-Jin (Department of Materials Science and Engineering, Chungnam National University) ;
  • Yoon, Soon-Gil (Department of Materials Science and Engineering, Chungnam National University)
  • Received : 2012.12.03
  • Accepted : 2013.04.23
  • Published : 2013.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

Off-axis magnetron sputtering was used for the crystallized ITO thin films deposition at various temperatures from 25 to $120^{\circ}C$. The ITO thin films were crystallized at $50^{\circ}C$ for Si (001) substrates and at $75^{\circ}C$ for PET substrate. The ITO thin films grown onto PET substrate at $120^{\circ}C$ were crystallized with a (222) preferred orientation. The 160-nm thick ITO films showed a resistivity of about $7{\times}10^{-4}{\Omega}{\cdot}cm$ and a transmittance of about 84% at a wavelength of 550 nm. Off-axis sputtering can be applied for low temperature crystallization of the ITO films.

Keywords

References

  1. S. Li, X. Qiao, and J. Chen, Mater. Chem. Phys., 98, 144 (2006). https://doi.org/10.1016/j.matchemphys.2005.09.012
  2. W. Song, J. KIEEME, 17, 1277 (2004).
  3. J. T. Hwang, J. M. Son, I. N. Kang, and Y. S. Bu, Polym. Sci. Technol., 14, 554 (2003).
  4. K. Maki, N. Komiya, and A. Szuki, Thin Solid Films, 455, 224 (2003).
  5. T. Kondo, Y. Sawada, K. Akiyama, and H. Funakubo, Thin Solid Films, 516, 5864 (2008). https://doi.org/10.1016/j.tsf.2007.10.040
  6. S. Venkat, N. J. Seong, and S. G. Yoon, Scripta Materialia, 61, 867 (2009). https://doi.org/10.1016/j.scriptamat.2009.07.018
  7. H. J. Choi, H. J. Jung, S. G. Hur, and S. G. Yoon, J. KIEEME, 24, 126 (2011).
  8. H. S. Kim, H. W. Jang, J. Y. Kang, J. S. Kim, S. J. Yoon, and C. K. Kim, J. KIEEME, 25, 563 (2012).
  9. C. Guillen and J. Herrero, Thin Solid Films, 480, 129 (2005).