고정밀 서피스 서보 방법론

High-Precision Surface Servo Methodology

High-precision surface actuator, in which in-plane motion is realized by not two-dimensional actuator superposing linear actuators but integrated planar actuator, has been developed to cope with the severe target performance like precise motion with large envelope. It is very difficult to accomplish the performance with the traditional actuating principle. So, various methods have been tried to break through the problem. This paper discusses some meaningful trials performed in the Nano Measurement and Precision Motion Control Lab. of Korea National University of Transportation.