Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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The GPU-based Parallel Processing Algorithm for Fast Inspection of Semiconductor Wafers

반도체 웨이퍼 고속 검사를 위한 GPU 기반 병렬처리 알고리즘

  • Park, Youngdae (Dept. of Electronics Engineering, Hoseo University) ;
  • Kim, Joon Seek (Dept. of Electronics Engineering, Hoseo University) ;
  • Joo, Hyonam (Dept. of Digital Display Engineering, Hoseo University)
  • 박영대 (호서대학교 전자공학과) ;
  • 김준식 (호서대학교 전자공학과) ;
  • 주효남 (호서대학교 디지털디스플레이공학과)
  • Received : 2013.08.20
  • Accepted : 2013.10.04
  • Published : 2013.12.01
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Abstract

In a the present day, many vision inspection techniques are used in productive industrial areas. In particular, in the semiconductor industry the vision inspection system for wafers is a very important system. Also, inspection techniques for semiconductor wafer production are required to ensure high precision and fast inspection. In order to achieve these objectives, parallel processing of the inspection algorithm is essentially needed. In this paper, we propose the GPU (Graphical Processing Unit)-based parallel processing algorithm for the fast inspection of semiconductor wafers. The proposed algorithm is implemented on GPU boards made by NVIDIA Company. The defect detection performance of the proposed algorithm implemented on the GPU is the same as if by a single CPU, but the execution time of the proposed method is about 210 times faster than the one with a single CPU.

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References

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