The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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Microwave Frequency Responses of Novel Chip-On-Chip Flip-Chip Bump Joint Structures

새로운 칩온칩 플립칩 범프 접합구조에 따른 초고주파 응답 특성

  • Oh, Kwang-Sun (Department of Radio Science and Engineering, Chungnam National University) ;
  • Lee, Sang-Kyung (Department of Radio Science and Engineering, Chungnam National University) ;
  • Kim, Dong-Wook (Department of Radio Science and Engineering, Chungnam National University)
  • Received : 2013.10.02
  • Accepted : 2013.11.19
  • Published : 2013.12.31
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Abstract

In this paper, novel chip-on-chip(CoC) flip-chip bump structures using chip-on-wafer(CoW) process technology are proposed, designed and fabricated, and their microwave frequency responses are analyzed. With conventional bumps of Cu pillar/SnAg and Cu pillar/Ni/SnAg and novel Polybenzoxazole(PBO)-passivated bumps of Cu pillar/SnAg, Cu pillar/Ni/SnAg and SnAg with the deposition option of $2^{nd}$ Polyimide(PI2) layer on the wafer, 10 kinds of CoC samples are designed and their frequency responses up to 20 GHz are investigated. The measurement results show that the bumps on the wafers with PI2 layers are better for the batch flip-chip process and have average insertion loss of 0.14 dB at 18 GHz. The developed bump structures for chips with fine-pitch pads show similar or slightly better insertion loss of 0.11~0.14 dB up to 18 GHz, compared with that of 0.13~0.17 dB of conventional bump structures in this study, and we find that they could be utilized in various microwave packages for high integration density.

본 논문에서는 칩온웨이퍼(Chip on Wafer: CoW) 공정기술을 이용한 새로운 칩온칩(Chip on Chip: CoC) 플립칩 범프 구조들을 제안하여 설계, 제작하고, 초고주파 영역에서의 응답 특성을 분석하였다. Cu 필러(Pillar)/SnAg, Cu 필러/Ni/SnAg의 기존 범프들, 그리고 SnAg, Cu 필러/SnAg, Cu 필러/Ni/SnAg를 Polybenzoxazole(PBO)로 보호한 새로운 범프들을 구성하여 웨이퍼의 $2^{nd}$ Polyimide(PI2) 층의 도포 유무에 따라 10가지 형태의 CoC 샘플들을 구조 설계하였고, 20 GHz까지의 주파수 특성이 고찰되었다. 측정 결과를 고려할 때 PI2 층이 도포된 소자들이 본 실험에 사용된 배치 플립칩 공정에 더 적합함을 알 수 있었고, 18 GHz에서 평균 0.14 dB의 삽입 손실을 보였다. 미세 패드 간격을 가지는 칩의 패키지 용도로 새로 개발된 범프들의 삽입 손실(0.11~0.14 dB)은 기존 범프들의 삽입 손실(0.13~0.17 dB)과 비교해 18 GHz까지 유사한 성능을 보이거나, 다소 좋은 특성을 보여 높은 집적도를 요구하는 다양한 초고주파 패키지에 활용될 수 있음이 확인되었다.

Keywords

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