한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제11권1호
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  • Pages.62-67
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  • 2012
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  • 1598-6721(pISSN)
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  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
권호 표지

나노 다공 구조를 가진 알루미나 재료의 UV 레이저 미세가공에 관한 실험적 기초 연구

Basic Experimental Investigations to UV Laser Micro-Machining of Nano-Porous Alumina Ceramic Material

  • 신보성 (부산대학교 정밀정형 및 금형가공연구소(ERC/NSDM)) ;
  • 이정한 (부산대학교 대학원 기계공학과)
  • 발행 : 2012.02.29
⟨ 이전 논문 다음 논문 ⟩

초록

Recently UV laser is widely used to process micro parts using various materials such as polymers, metals and ceramics because it has a very high intensity at the focused spot area. It is generally known that there are still some difficulties for alumina($Al_2O_3$) ceramics to directly make micro patterns like holes and lines on the surface of working material using 355nm UV laser because the alumina has a very low absorption coefficient at that wavelength. But nowadays new alumna with nano-porous holes is developed and applied to advanced micro functional parts of IT, BT and BT industries. In this paper, we are going to show the mechanism of photo-thermal ablation for nano-porous ceramics. Inside hole there is a lot of multiple reflections along the depth of hole. Experimentally we can find the micro hole drilling and micro grooving on the surface of nano-porous alumina.

키워드

참고문헌

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