Journal of Korean Society of Industrial and Systems Engineering (산업경영시스템학회지)

Society of Korea Industrial and System Engineering (한국산업경영시스템학회)
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Scheduling Algorithms for Minimizing Total Weighted Flowtime in Photolithography Workstation of FAB

반도체 포토공정에서 총 가중작업흐름시간을 최소화하기 위한 스케쥴링 방법론에 관한 연구

  • Choi, Seong-Woo (Department of Business Administration, Kyonggi University)
  • Received : 2011.11.10
  • Accepted : 2012.02.08
  • Published : 2012.03.31
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Abstract

This study focuses on the problem of scheduling wafer lots of several recipe(operation condition) types in the photolithography workstation in a semiconductor wafer fabrication facility, and sequence-dependent recipe set up times may be required at the photolithography machines. In addition, a lot is able to be operated at a machine when the reticle(mask) corresponding to the recipe type is set up in the photolithography machine. We suggest various heuristic algorithms, in which developed recipe selection rules and lot selection rules are used to generate reasonable schedules to minimizing the total weighted flowtime. Results of computational tests on randomly generated test problems show that the suggested algorithms outperform a scheduling method used in a real manufacturing system in terms of the total weighted flowtime of the wafer lots with ready times.

Keywords

References

  1. Bruno, j., Coffiman, Jr., E. G., and Sethi, G.; "Scheduling independent tasks to reduce mean finishing time,ʼ Comunications of the ACM, 17(7) : 382-387, 1974. https://doi.org/10.1145/361011.361064
  2. Choi, S-W. and Kim, Y-D.; "Minimizing makespan on a two-machine re-entrant flowshop," Journal of the Operational Research Society, 58(7) : 972-981, 2007. https://doi.org/10.1057/palgrave.jors.2602220
  3. Choi, S-W. and Kim, Y-D.; "Minimizing makespan on an m-machine re-entrant flowshop," Computers and Operations Research, 35(5) : 1684-1696, 2008. https://doi.org/10.1016/j.cor.2006.09.028
  4. Choi, S-W. and Kim, Y-D.; "Minimizing total tardiness on a two-machine re-entrant flowshop," Journal of the Operational Research Society, 199(2) : 375-384, 2009. https://doi.org/10.1016/j.ejor.2008.11.037
  5. Choi, S-W., Lim, T-K., and Kim Y-D.; "Heuristics for scheduling wafer lots at the deposition workstation in a semiconductor wafer fab," 36(2) : 125-137, 2010.
  6. Kim, Y-D., Kim, J-U., Lim, S-K., and Jun, H-B.; "Duedate based scheduling and control policies in a multiproduct semiconductor wafer fabrication facility," IEEE Transactions on Semiconductor Manufacturing, 11(1) : 155- 164, 1998. https://doi.org/10.1109/66.661295
  7. Lawler, E. L. and Moore, J. M.; "A functional equation and its application to resource allocation and sequencing problems," Management Science, 16(1) : 77-84, 1969. https://doi.org/10.1287/mnsc.16.1.77
  8. Lee, C. Y. and Uzsoy, R.; "A new dynamic programming algorithm for the parallel machines total weighed completion time problem," Operational Research Letters, 11 : 73-75, 1992. https://doi.org/10.1016/0167-6377(92)90035-2
  9. Lee, G-C.; "Scheduling methods for a hybrid flowshop with dynamic order arrival," Journal of the Korea Institute of Industrial Engineers, 32(4) : 373-381, 2006.
  10. Lim, S-K., Kim, J-G., and Kang, J-G.; "A collaboration system for two-stage semiconductor manufacturing supply chain," Journal of the Korea management Engineers Society, 14(2) : 11-29, 2009.
  11. Sung, C. S. and Choung, Y. I.; "Minimizing Makespan on a Single Burn-in Oven in Semiconductor Manufacturing," European Journal of Operational Research, 120(3) : 559- 574, 2000. https://doi.org/10.1016/S0377-2217(98)00391-9
  12. Thiagarajan, S. and Rajendra, C.; "Scheduling in dynamic assembly job-shops to minimizie the sum of weighted earliness, weighted tardiness and weighted flowtime of jobs," Computers and Industrial Engineering, 49(4) : 463-503, 2005. https://doi.org/10.1016/j.cie.2005.06.005
  13. Webster, S.; "A priority rule for minimizing weighted flow time in a class of parallel machine scheduling problems," European Journal of Operational Research, 70(3) : 327- 334, 1993. https://doi.org/10.1016/0377-2217(93)90244-H
  14. Webster, S.; "A note on schedule of n jobs on two identical machines to minimize weighted mean flow time," Computers and Industrial Engineering, 26 : 795-796, 1994. https://doi.org/10.1016/0360-8352(94)90014-0
  15. Wein, L. M.; "Scheduling semiconductor wafer fabrication," IEEE Transactions on Semiconductor Manufacturing, 1(3) : 115-130, 1988. https://doi.org/10.1109/66.4384