Progress in Superconductivity and Cryogenics (한국초전도ㆍ저온공학회논문지)

The Korean Society of Superconductivity and Cryogenics (한국초전도저온학회)
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Progress in the co-evaporation technologies developed for high performance REBa2Cu3O7-δ films and coated conductors

  • Lee, J.W. (Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University) ;
  • Yoo, S.I. (Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University)
  • Received : 2012.11.15
  • Accepted : 2012.11.23
  • Published : 2012.11.30
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Abstract

In this review article, we focus on various co-evaporation technologies developed for the fabrication of high performance $REBa_2Cu_3O_{7-{\delta}}$ (RE: Y and Rare earth elements, REBCO) superconducting films. Compared with other manufacturing technologies for REBCO films such as sputtering, pulsed laser deposition (PLD), metal-organic deposition (MOD), and metal organic chemical vapor deposition (MOCVD), the co-evaporation method has a strong advantage of higher deposition rate because metal sources can be used as precursor materials. After the first attempt to produce REBCO films by the co-evaporation method in 1987, various co-evaporation technologies for high performance REBCO films have been developed during last several decades. The key points of each co-evaporation technology are reviewed in this article, which enables us to have a good insight into a new high throughput process, called as a Reactive Co-Evaporation by Deposition and Reaction (RCE-DR).

Keywords

References

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