한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제29권12호
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  • Pages.1279-1284
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  • 2012
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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초소경 엔드밀링을 이용한 미세 가공특성 분석 및 응용가공

Analysis of Micro Machining Characteristics using End-milling and Its Applications

  • 최환진 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 박언석 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 전은채 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 제태진 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 최두선 (과학기술연합대학원대학교 나노메카트로닉스 전공)
  • Choi, Hwan-Jin (Dept. of NanoMechatronics, University of Science and Technology) ;
  • Park, Eun-Suk (Dept. of NanoMechatronics, University of Science and Technology) ;
  • Jeon, Eun-Chae (Dept. of NanoMechatronics, University of Science and Technology) ;
  • Je, Tae-Jin (Dept. of NanoMechatronics, University of Science and Technology) ;
  • Choi, Doo-Sun (Dept. of NanoMechatronics, University of Science and Technology)
  • 투고 : 2012.10.16
  • 심사 : 2012.10.23
  • 발행 : 2012.12.01
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초록

Micro structures which are widely used at various fields are commonly fabricated by lithograph, etching and laser methods. Recently, with the emergence of micro tools and ultra-precision machine tools, fabrication of the micro structures obtained using end-milling are studied. However, there are some problems due to the diameter of the micro end-mill getting smaller below $100{\mu}m$. The micro run-out resulted from miniaturization of end-mills have influence seriously on accuracy of micro structures. The error of run-out with a tooling jig showed a decrease of about $9.3{\mu}m$. Furthermore, micro structures with width of $30{\mu}m$ could be applied through experiments of slot machining obtained using 30 and $50{\mu}m$ end-mill. Also, narrow angle structures with $30^{\circ}$ angle could be applied through analysis of machining acute angle structures. Based on basic experiments, micro fluidics channels and spiral patterns for air bearing were machined.

키워드

참고문헌

  1. Han, M., Lee, W., Lee, S. K., and Lee, S. S., "3D microfabrication with inclined/rotated UV lithography," Sensors and Actuator A: Physical, Vol. 111, No. 1, pp. 14-20, 2004. https://doi.org/10.1016/j.sna.2003.10.006
  2. Hartl, I., Li, X. D., Chudoba, C., Ghanta, R. K., Ko, T. H., Fujimoto, J. G., Ranka, J. K., and Windeler, R. S., "Ultrahigh-resolution optical coherence tomography using continuum generation in an air-silica microstructure optical fiber," Optics Letters, Vol. 26, No. 9, pp. 608-610, 2001. https://doi.org/10.1364/OL.26.000608
  3. Loh, B. K., Kim, W., and Shim, K. B., "Fabrication of Micro-channels for Wave-Micropump Using Stereolithography and UV Photolithography," J. of the KSPE, Vol. 24, No. 12, pp. 128-135, 2007.
  4. Noh, Y. J., Arai, Y., Tano, M., and Gao, W., "Fabrication of large-area micro-lens arrays with fast tool control," Int. J. Precis. Eng. Manuf., Vol. 9, No. 4, pp. 32-38, 2008.
  5. Kang, I. S., Jeong, Y. S., Kwon, D. H., Kim, J. H., Kim, J. S., and Ahn, J. H., "Tool Condition Monitoring using AE Signal in Micro Endmilling," J. of the KSPE, Vol. 23, No. 1, pp. 64-71, 2006.
  6. Kim, S. J., Kim, K. S., Cho, B. M., Kim, H. C., and Lee, D. J., "Characteristics of slot machining by using micro endmill," Proc. of KSPE Spring Conference, pp. 245-246, 2007.
  7. Je, T. J., Choi, D. S., Lee, E. S., Hong, S. M., Lee, J. C., and Choi, H., "Micro end-milling technology for micro pole structures," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 4, No. 4, pp. 7-13, 2005.
  8. Jeon, D. S., Seo, T. I., and Yoon, G. S., "A study of machining error compensation for tool deflection in side-cutting processes using micro end-mill," Transaction of the Korean Society of Machine Tool Engineers, Vol. 17, No. 2, pp. 128-134, 2008.
  9. Hsieh, H. and Chu, C., "Optimization of tool path planning in 5-axis flank milling of ruled surfaces with improved PSO," Int. J. Precis. Eng. Manuf., Vol. 13, No. 1, pp. 77-84, 2012. https://doi.org/10.1007/s12541-012-0011-9
  10. Kim, G. H., Yoon, G. S., Son, J. I., and Cho, M. W., "Investigation on the effect of low temperature micro cutting process for mold core material," Int. J. Precis. Eng. Manuf., Vol. 13, No. 5, pp. 783-788, 2012. https://doi.org/10.1007/s12541-012-0103-6
  11. Je, T. J., Jeon, E. C., Jang, S. H., Choi, D. S., Choi, H. J., and Park, E. S., "Machining technology of micro shape parts using micro end-mill," Proc. of KSPE Spring Conference, pp. 203-204, 2012.
  12. Lee, K. Y., Lee, D. K., Lee, K. W., Park, J. H., and Kim, J. S., "Runout modeling and measurement method in 4-flutes end milling," J. of the KSPE, Vol. 21, No. 3, pp. 22-29, 2004.
  13. Hong, Y. C., Ha, S. J., and Cho, M. W., "Predicting of cutting forces in a micromilling process based on frequency analysis of sensor signals and modified polynomial neural network algorithm," Int. J. Precis. Eng. Manuf., Vol. 13, No. 1, pp. 17-23, 2012. https://doi.org/10.1007/s12541-012-0003-9