Abstract
Recently, the LCD manufacturing industries try to maximize the productivity of LCD panels due to sharp increase in the market need of LCD display. Usually, the increase in manufacturing speed induces additional vibration of glasses and manufacturing machineries. This kind of vibration can induce bad effects on the manufacturing accuracy, and even can damage the glasses. The vibration signal of glass itself is very useful to predict the allowable maximum level of manufacturing speed. Therefore, it is necessary to measure the vibration of the glass itself and a very thin vibration measurement system attachable on the glass is needed. Since in some processes the glasses need to go through very thin gaps such as 2.5mm, We develop a glass vibration measurement system with the thickness of 1.3mm. The system measures the glass vibration using MEMS type accelerometers and store vibration data in a Nand-Flash memory. The performance of the develop system has been verified on a real LCD manufacturing line and the accuracy of vibration measurement is comparable with that of an accurate commercial vibration measurement system.
