Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Examination on Active Pneumatic Vibration Isolation Table with Moving Masses on It by Time Delay Control

이동 질량을 포함하는 능동형 공압제진대에 대한 시간지연제어기법의 적용 검토

  • 신윤호 (한국기계연구원 시스템다이나믹스실) ;
  • 문석준 (한국기계연구원 시스템다이나믹스실) ;
  • 정정훈 (한국기계연구원 시스템다이나믹스실) ;
  • 김병현 (한국기계연구원 시스템다이나믹스실)
  • Received : 2011.06.30
  • Accepted : 2011.07.25
  • Published : 2011.09.20
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Abstract

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

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References

  1. Gordon, C. G., 1991, San Jose, CA., Generic Criteria for Vibration Sensitive Equipment, Proceedings of SPIE.
  2. Amick, H., 1997, On Generic Vibration Criteria for Advanced Technology Facilities, Journal of the Institute of Environmental Sciences, Vol. 5, pp. 35-44.
  3. Lee, J.-H. and Kim, K.-J., 2007, Modeling of Nonlinear Complex Stiffness of Dual-chamber Pneumatic Spring for Precision Vibration Isolations, Journal of Sound and Vibration, Vol. 301, pp. 909-926. https://doi.org/10.1016/j.jsv.2006.10.029
  4. Lee, J.-H., 2007, Modeling of Dual-chambet Pneumatic Spring and Application to Transmissibility Design of Vibration Isolation Table, PhD Dissertation, KAIST, Dept. of Mechanical Engineering.
  5. Moon, S. J., Jung, H. J., Shin, Y. H., Jang, D. D., Jeong, J. A. and Moon, Y. J., 2011, Development of a Hybrid Mount System Combined Airspring with Piezostack Actuator for Microvibration, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 21, No. 1, pp. 56-65. https://doi.org/10.5050/KSNVE.2011.21.1.056
  6. Song, J. h., Kim, K. Y. and Park, Y. P., 1994, Active Control of Air-spring Vibration Isolator, Transactions of the KSME, Vol. 19, No. 7, pp. 1605-1617.
  7. Moon, S. J., Park, S. H., Jeong, J. A., Huh, Y. C., Kim, C. H. and Choi, S. M., 2011, A Study on the Development of a Hybrid Electromagnetic Actuator Against Microvibration, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 21, No. 5, pp. 475-483. https://doi.org/10.5050/KSNVE.2011.21.5.475
  8. Shin, Y. H. and Kim, K. J., 2009, Performance Enhancement of Pneumatic Vibration Isolation Tables in Low Frequency Range by Time Delay Control, Journal of Sound and Vibration, Vol. 321, No. 3-5, pp. 537-553. https://doi.org/10.1016/j.jsv.2008.10.030
  9. Shin, Y. H., Kim, K. J., Chang, P. H. and Han, D. K., 2010, Three Degrees of Freedom Active Control of Pneumatic Vibration Isolation Table by Pneumatic and Time Delay Control Technique, Transactions of the ASME(Journal of Vibration and Acoustics), Vol. 132, pp. 051013-1-12 https://doi.org/10.1115/1.4001509
  10. Youcef-Toumi, K. and Ito, O., 1990, A Time Delay Controller for Systems with Unknown Dynamics, Journal of Dynamic Systems, Measurement and Conrtol(ASME), Vol. 112, No. 1, pp. 133-142. https://doi.org/10.1115/1.2894130
  11. Sun, J. O., Shin, Y. H. and Kim, K. J., 2007, A Study on Response Analysis of 6-DOF Pneumatic Vibration Isolation Table Loaded by Transient Movements of Carriage on It, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 17, No. 6, pp. 515-523. https://doi.org/10.5050/KSNVN.2007.17.6.515