• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.9
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.7 s.124
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.903-908
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• 2006

As environmental vibration requirements on precision equipment become more stringent. use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the time delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.1
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• pp.110-122
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• 2008

Pneumatic vibration isolator typically consisting of dual-chamber pneumatic springs and a rigid table are widely employed for proper operation of precision instruments such as optical devices or nano-scale equipments owing to their low stiffness- and high damping-characteristics. As environmental vibration regulations for precision instruments become more stringent, it is required to improve further the isolation performance. In order to facilitate their design optimization or active control, a more accurate mathematical model or complex stiffness is needed. Experimental results we obtained rigorously for a dual-chamber pneumatic spring exhibit significantly amplitude dependent behavior, which cannot be described by linear models in earlier researches. In this paper, an improvement for the complex stiffness model is presented by taking two major considerations. One is to consider the amplitude dependent complex stiffness of diaphragm necessarily employed for prevention of air leakage. The other is to employ a nonlinear model for the air flow in capillary tube connecting the two pneumatic chambers. The proposed amplitude-dependent complex stiffness model which reflects dependency on both frequency and excitation amplitude is shown to be very valid by comparison with the experimental measurements. Such an accurate nonlinear model for the dual-chamber pneumatic springs would contribute to more effective design or control of vibration isolation systems.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.184-189
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by rising experiment and simulation. Optimal design for a passive air spring can be obtained by fluting the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the act ive vibration isolation table wi th the bet ter isolation performance.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.1 s.118
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• pp.72-79
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• 2007

As environmental vibration requirements on precision equipment become more stringent, use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the tine delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.497-498
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• 2010