Journal of the Korean Society of Visualization (한국가시화정보학회지)

The Korean Society of Visualization (한국가시화정보학회)
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Fabrication and Performance Evaluation of Thin Film RTD Temperature Sensor Array on a Curved Glass Surface

곡면 유리 표면 위에서 박막 측온저항체 온도센서 어레이 제작 및 성능 평가

  • Received : 2011.05.20
  • Accepted : 2011.06.10
  • Published : 2011.06.30
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Abstract

This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to $300^{\circ}C$ without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.

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