Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Resonant Displacement and Piezoelectric Properties of Thickness Shear Mode Piezoelectric Devices According to Length/Thickness Ratio

길이와 두께 비에 따른 두께 전단모드 압전소자의 공진 변위 및 압전특성

  • Park, Min-Ho (Department of Electrical Engineering, Semyung University) ;
  • Yoo, Ju-Hyun (Department of Electrical Engineering, Semyung University) ;
  • Hong, Jae-Il (Department of Electrical Information Control, Dongseoul College) ;
  • Jeong, Yeong-Ho (Department of Electrical Engineering, Chungju National University)
  • 박민호 (세명대학교 전기공학과) ;
  • 류주현 (세명대학교 전기공학과) ;
  • 홍재일 (동서울대학교 전기정보제어과) ;
  • 정영호 (충주대학교 전기공학과)
  • Received : 2011.05.06
  • Accepted : 2011.05.24
  • Published : 2011.06.01
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Abstract

In this study, thickness shear mode piezoelectric devices for AE sensor with excellent displacement and sensitivity characteristics were simulated using ATILA FEM program, and then fabricated. Displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electromechanical coupling factor was obtained when the ratio of Length/Thickness was 1. The piezoelectric device of L/T= 1 exhibited the optimum values of fr= 150 kHz, displacement= $6.23{\times}10^{-8}$[m], $k_{15}$= 0.598. The results show that the thickness shear mode piezoelectric device is a promising candidate for the application of AE sensor piezoelectric device.

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References

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