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고주파유도결합플라즈마 반응기에서 물로부터 수소생성효율을 높이기 위한 공정변수에 대한 연구

Study on Process Parameters for Effective H2 Production from H2O in High Frequency Inductively Coupled Plasma Reactor

  • Kwon, Sung-Ku (Department of Materials Science and Engineering, Kunsan National Univ.) ;
  • Jung, Yong-Ho (National Fusion Research Institute)
  • 투고 : 2011.03.31
  • 심사 : 2011.04.22
  • 발행 : 2011.04.30

초록

The effect of process parameters on $H_2$ production from water vapor excited by HF ICP has been qualitatively examined for the first time. With the increase of ICP power, characteristics of $H_2$ production from $H_2O$ dissociation in plasma was divided into 3 regions according to both reaction mechanism and energy efficiency. At the edge of region (II) in the range of middle ICP power, energy effective hydrogen production from $H_2O$ plasma can be achieved. Furthermore, within the region (II) power condition, heating of substrate up to $500^{\circ}C$ shows additional increase of 70~80% in $H_2$ production compared to $H_2O$ plasma without substrate heating. This study have shown that combination of optimal plasma power (region II) and wall heating (around $500^{\circ}C$) is one of effective ways for $H_2$ production from $H_2O$.

키워드

참고문헌

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