Polycarbonate Track-Etched Membrane Micromachining by Ultrafast Pulse Laser

극초단 레이저를 이용한 PC-TEMs 초정밀 가공에 대한 연구

  • Choi, Hae-Woon (Department of Mechanical and Automotive Engineering, Keimyung Univ.)
  • 최혜운 (계명대학교 기계자동차공학과)
  • Received : 2010.09.13
  • Accepted : 2010.11.09
  • Published : 2011.01.01

Abstract

PC-TEMs (Polycarbonate Track-Etched membranes) were micro-drilled for biomedical applications by ultrafast pulsed laser. The ablation and damage characteristics were studied on PE-TEMs by assuming porous thin membranes. The experiments were conducted in the range of 2.02 $J/cm^2$ and 8.07$J/cm^2$. The ablation threshold and damage threshold were found to be 2.56$J/cm^2$ and 1.14$J/cm^2$, respectively. While a conical shaped drilled holes was made in lower fluence region, straight shaped holes were drilled in higher fluence region. Nanoholes made the membrane as porous material and ablation characteristics for both bulk and thin film membranes were compared.

Keywords

References

  1. Stuart, B., Feit, M., Rubenchik, A., Shore, B. and Perry, M., "Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses," Physical Review Letters, Vol. 74, No. 12, pp. 2248-2252, 1995. https://doi.org/10.1103/PhysRevLett.74.2248
  2. Lee, J. and Shon, H., "Ultrafast laser micromachining technology," J. of KSPE, Vol. 27, No. 2, pp. 7-12, 2010.
  3. Chung, I., Kang, K., Kim, J., Sohn, I., Noh, Y. and Lee, J., "Characteristics of the Femto-second Pulsed Laser Ablation according to Feed Velocity on the Invar Alloy," J. of KSPE, Vol. 26, No. 3, pp. 25-31, 2009.
  4. Choi, H. and Shin, H., "Die surface texturing by Femtosecond laser for friction reduction," J. of KSPE, Vol. 26, No. 5, pp. 57-63, 2009.
  5. Choi, H., Johnson, J., Nam, J., Farson, D. and Lannutti, J., "Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation," J. of Laser Applications, Vol. 19, No. 4, pp. 225-231, 2007. https://doi.org/10.2351/1.2795749
  6. Farson, D., Choi, H., Lu, C. and Lee, L., "Femtosecond laser bulk micromachining of microfluid channels in poly-methylmethacrylate," J. of Laser Applications, Vol. 18, No. 3, pp. 210-215, 2006. https://doi.org/10.2351/1.2227015
  7. Isopore Membrane Filter, www.millipore.com
  8. Baudach, S., Bonse, J., Kruger, J. and Kautek, W., "Ultrashort pulse laser ablation of polycarbonate and plumethylmethacrylate," Applied Surface Science, Vol. 154-155, No. 1-4, pp. 555-560, 2000. https://doi.org/10.1016/S0169-4332(99)00474-2