References
- Amarsinghe, R., Dao, D. V. and Toriyama, T., Sugiyama, S., 2005, Design and Fabrication of Miniaturized Six-degree of Freedom Piezoresistive Accelerometer, MEMS2005 Conference, pp. 351-354.
- Bao, M. H., 2000, Micro Mechanical Transducers, Handbook of Sensors and Actuators, Vol. 8 - Pressure Sensors, Accelerometers and Gyroscopes, edited by Middelhoek, S.(Elsvier, Amsterdam).
- Roylance, L. M. and Angell, J. B., 1979, A Batch-fabricated Silicon Accelerometer, IEEE Trans. on Electron Devices. Vol. ED-26, pp. 1911-1917. https://doi.org/10.1109/T-ED.1979.19795
- Rodulf, F., 1983, A Micromechanical Capacitive Accelerometer with a Two-point Inertial-mass Suspension, Sensors and Actuators, Vol. 4, pp. 191-198. https://doi.org/10.1016/0250-6874(83)85024-0
- Kuehnel, W. and Sherman, S., 1994, A Surface Micromachined Silicon Accelerometer with On-chip Detection Circuitry, Sensors and Actuators A, Vol. 45, pp. 7-16. https://doi.org/10.1016/0924-4247(94)00815-9
- van Kampen, R. P. and Wolffenbuttel, R. F., 1998, Modeling the Mechanical Behavior of Bulk-micromachined Silicon Accelerometers, Sensors and Actuators A, Vol. 64, pp. 137-150. https://doi.org/10.1016/S0924-4247(98)80007-1
- Huang, S., Li, X., Song, Z., Wang, Y., Yang, H., Che, L. and Jiao, J., 2005, A High-performance Micromachined Piezoresistive Accelerometer with Axially Stressed Tiny Beams, Journal of Micromechanics And Microengineering, Vol. 15, pp. 993-1000. https://doi.org/10.1088/0960-1317/15/5/014
- Jung, K. S., Moon, S. J. and Yoo, H. H., 2005, Responses and Modal Analysis of Micro Double Cantilever Beams Interaced by Electronic Forces, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 15, No. 2, pp. 199-205. https://doi.org/10.5050/KSNVN.2005.15.2.199
- Amarasinghe, R., Dao, D. V., Toriyama, T. and Sugiyama, S., 2007, Development of Miniaturized 6-Axis Accelerometer Utilizing Piezoresistive Sensing Slements, Sensors and Actuators A, Vol. 134, pp. 310-320. https://doi.org/10.1016/j.sna.2006.05.044
- Kane, T. and Levinson, D., 1985, Dynamics, Theory and Appllications, McGraw-Hill Book.