• Journal of the KSME
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• v.49 no.9
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• pp.28-34
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• 2009

이 글에서는 열광기전 에너지 변환에 대한 대략적인 설명과 열광기전 시스템의 장단점, 그리고 열광기전 성능 개선을 위한 마이크로/나노 스케일에서의 복사열전달 연구에 대해 소개한다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.7
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• pp.52-58
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• 2000

최근 첨단 미세가공기술로 주목을 받고 있는 실리콘 마이크로머시닝 기술과 이를 기반으로 한 산업용 MEMS 개발현황을 소개한다. 전반부에서는 마이크로머시닝 기술의 종류를 소개하고 각각의 기술에 대해 기술근원, 미세가공원리와 기본 가공공정을 간략히 요약한 후 기전 집적형태의 마이크로머신과의 연계성을 고려한 시스템적인 측면에서의 기술특성을 상호 비교한다. 또한 가공의 양산성, 재현성, 조립성 측면에서 마이크로머시닝의 가공성을 조명함과 동시에 향후 발전방향을 전망한다.(중략)

• Journal of the Korean Society of Propulsion Engineers
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• v.12 no.1
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• pp.64-70
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• 2008

Thanks to the breakthroughs in micro fabrication technology, numerous concepts of micro aerospace systems including micro aerial vehicle, nano satellite and micro robot have been proposed. In order to activate these mobile micro systems, high density power in a small scale power source is required. However, we still do not have micro power source that has energy density that can support these systems. In the present article, status of micro power sources are described and alternatives that have been derived from the past experience are proposed.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.2
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• pp.15-22
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• 2008

• Journal of the KSME
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• v.33 no.6
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• pp.552-570
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• 1993

이 글에서는 마이크로머신 특성을 응용한 제품들과 이에 내포된 기반기술 및 관련 연구분야를 소개하고자 한다. 먼저 세부기술과 연구과제를 언급하기에 앞서, 마이크로머신 기술의 배경과특 성을 소개하고, 기존 기술들과의 비교 . 연계를 통해 기술 공간상에서의 마이크로머신 기술의 좌표를 제시하고자 한다. 그 이후 본론에 들어가서, 마이크로머신 관련기술 및 연구분야를 다음과 같이 크게 두 가지 관점에서 정리하여 소개한다. 먼저 산업분야별 응용제품 및 기술적용 예를 통하여 '제품기술' 관점에서 마이크로머신 기술을 조명한 후, 이러한 제품기술의 근간이 되는 연구 분야별 관련기술의 소개를 통하여 '기반기술' 측면에서 마이크로머신기술을 정리하고자 한다. 특히 후반부 마이크로머신 기반 기술부분에서는 마이크로머신의 설계, 해석, 제작과 관련된 기술과제 중 비교적 기계공학분야와 연관이 있는 부분을 중점적으로 다루었다. 끝으로, 제품 기 술로서의 마이크로머신기술의 현황 기술로서의 당면 과제 등을 조명하고, 관련기술의 성숙요건을 제시해본다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2006.11a
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• pp.15-18
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• 2006

Recently, experimental visualization of microscale fluid transport has attacted considerable attention in designing microelectromechanical systems. Fluid-surface interactions on hydrophobic and hydrophilic surfaces can play a key role in passively controlling microfluidics. Here we investigate the slip boundary condition depending on the surface characteristics; hydrophilic, hydrophobic wettabilities. Using the micro-PIV, velocity profiles are measured in the glass (hydrophilic), PDMS (hydrophobic) microchannels.

• 유체기계공업학회:학술대회논문집
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• 2002.12a
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• pp.482-485
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• 2002

Development projects in KAIST rotted to the micro thermal device is introduced. Multi disciplinary research team is composed by combustion group and semiconductor group in KAIST and catalyst research center in KRICT to develop micro thermal/fluidic device and various items are on development. Among the projects, various kind of componenst that is required by the micro thermal devicesystem is introduced. Technology related to development of micro combustor, Micro igniter, micro fabrication of 3D structure, micro reactor and micro catalyst preparation is introduced.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.1 s.244
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• pp.1-7
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• 2006

A system for the electrical bio signal detection for a microchip is proposed. Gold nanoparticles were selected for the system for their bio-compatibility and potential for higher sensitivity with large surface areas. For the estimation of the conductivity of gold nanoparticles, microchips with interdigitated microelectrodes of 3,5,7 and $9\;{\mu}m$ spacing were fabricated. In addition, a simulation program was developed to estimate the electrical resistance of the fabricated microchip. The results of conduction simulation for the nanoparticles show good agreements with experimental data, which validate the proposed system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1988-1991
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• 2005

A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1063-1066
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• 1995

This paper presents a precition control of an electrostatic microactuator. For the generation of sufficient electrostatic force, a donse comb-type electrostatic microactuator is designed and manufactureed via MEMS (micro-electro-mechanical systems) process. The nonlinear plant and the linear plant of the microactuator are established through the comparison of experimental results and simulation results. A feedforward controller is designed via MATLAB simulation using the inverse function of the nonlinear plant. the experiment for the precise position tracking control is undertaken to show the control efficiency of the proposed controller.