Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characterization of Sandwiched MIM Capacitors Under DC and AC Stresses: Al2O3-HfO2-Al2O3 Versus SiO2-HfO2-SiO2

Al2O3-HfO2-Al2O3와 SiO2-HfO2-SiO2 샌드위치 구조 MIM 캐패시터의 DC, AC Stress에 따른 특성 분석

  • 곽호영 (충남대학교 전자전파정보통신공학과) ;
  • 권혁민 (충남대학교 전자전파정보통신공학과) ;
  • 권성규 (충남대학교 전자전파정보통신공학과) ;
  • 장재형 (충남대학교 전자전파정보통신공학과) ;
  • 이환희 (충남대학교 전자전파정보통신공학과) ;
  • 이성재 (충남대학교 전자전파정보통신공학과) ;
  • 고성용 ;
  • 이원묵 ;
  • 이희덕 (충남대학교 전자전파정보통신공학과)
  • Received : 2011.11.10
  • Accepted : 2011.11.14
  • Published : 2011.12.01
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Abstract

In this paper, reliability of the two sandwiched MIM capacitors of $Al_2O_3-HfO_2-Al_2O_3$ (AHA) and $SiO_2-HfO_2-SiO_2$ (SHS) with hafnium-based dielectrics was analyzed using two kinds of voltage stress; DC and AC voltage stresses. Two MIM capacitors have high capacitance density (8.1 fF/${\mu}m^2$ and 5.2 fF/${\mu}m^2$) over the entire frequency range and low leakage current density of ~1 nA/$cm^2$ at room temperature and 1 V. The charge trapping in the dielectric shows that the relative variation of capacitance (${\Delta}C/C_0$) increases and the variation of voltage linearity (${\alpha}$/${\alpha}_0$) gradually decreases with stress-time under two types of voltage stress. It is also shown that DC voltage stress induced greater variation of capacitance density and voltage linearity than AC voltage stress.

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References

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