Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Study on Design of high Efficient Cooling System for Low Temperature Furnace in Semiconductor Processing

반도체 공정용 저온 열처리로의 고효율 냉각시스템 설계에 관한 연구

  • Jeoung, Du-Won (School of Mechatronics Engineering Korea University of Technology and Education) ;
  • Suh, Ma-Son (Co., LTD Youngin Equipment solution Technology) ;
  • Kim, Kwang-Sun (School of Mechatronics Engineering Korea University of Technology and Education)
  • 정두원 (한국기술교육대학교 메카트로닉스 공학부) ;
  • 서민석 ((주)YEST) ;
  • 김광선 (한국기술교육대학교 메카트로닉스 공학부)
  • Received : 2010.11.30
  • Accepted : 2010.12.17
  • Published : 2010.12.31
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Abstract

According to recent changes in industry for semiconductor devices, a low-temperature treatment has become a necessity. These changes relate to size refinement and the development of new materials. While variation in cooling efficiency does not affect the yield when using a high-temperature treatment, uniform cooling efficiency is necessary avoid "inconsistencies/bends" in low temperature treatments. However it is difficult to increase temperature stabilization in low temperature treatments. In this paper, using CFD (Computer Fluid Dynamics), we analyze and manipulate the design and input of the low-temperature system to attempt to control for temperature variations within the quartz tube, of which airflow appears to be a predominant factor. This simulation includes variable inputs such as airflow rate, head pressure, and design manipulations in the S.C.U. (Super Cooling Unit).

Keywords

References

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