한국시뮬레이션학회논문지 (Journal of the Korea Society for Simulation)

한국시뮬레이션학회 (The Korea Society for Simulation)
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시뮬레이션 기반 적응형 실시간 작업 제어 프레임워크를 적용한 웨이퍼 제조 공정 DEVS 기반 모델링 시뮬레이션

DEVS-based Modeling Simulation for Semiconductor Manufacturing Using an Simulation-based Adaptive Real-time Job Control Framework

  • 송해상 (서원대학교 컴퓨터공학과) ;
  • 이재영 ((주)하이닉스반도체) ;
  • 김탁곤 (한국과학기술원 전기및전자공학과)
  • 투고 : 2010.06.07
  • 심사 : 2010.09.07
  • 발행 : 2010.09.30
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초록

반도체 제조공정에 내재된 복잡성은 작업일정(job scheduling) 문제를 해석적 방법으로는 풀기 어렵기 때문에 보통 시스템 파라미터의 변화에 대한 효과를 이산사건 모델링 시뮬레이션에 의존하여 왔다. 한편 장비 고장 등 예측 불가능한 사건들은 고정된 작업일정 기법을 사용할 경우 전체 공정의 효율을 악화시킨다. 따라서 이러한 불확실성에 대해 최적의 성능을 내기 위해서는 작업일정을 실시간으로 대처 변경하는 것이 필요하다. 본 논문은 반도체 제조 공정에 대해 시스템 제어관점의 접근방법을 적용하여 이 문제에 적응형 실시간 작업제어 틀을 제안하고, DEVS 모델링 시뮬레이션 환경을 기반으로 제안된 틀을 설계 구현하였다. 제안된 방법은 기존의 임기응변적인 소프트웨어적인 방법에 비추어볼 때 전체 시스템을 이해하기 쉬우면서도 또한 추가되는 작업제어 규칙도 쉽게 추가 적용할 수 있는 유연성을 장점으로 가지고 있다. 여러 가지 실험결과 제안된 적응형 실시간 작업제어 프레임워크는 고정 작업규칙 방법에 비해 훨씬 나은 결과를 보여주어 그 효용성을 입증하였다.

The inherent complexity of semiconductor fabrication processes makes it hard to solve well-known job scheduling problems in analytical ways, which leads us to rely practically on discrete event modeling simulations to learn the effects of changing the system's parameters. Meanwhile, unpredictable disturbances such as machine failures and maintenance diminish the productivity of semiconductor manufacturing processes with fixed scheduling policies; thus, it is necessary to adapt job scheduling policy in a timely manner in reaction to critical environmental changes (disturbances) in order for the fabrication process to perform optimally. This paper proposes an adaptive job control framework for a wafer fabrication process in a control system theoretical approach and implements it based on a DEVS modeling simulation environment. The proposed framework has the advantages in view of the whole systems understanding and flexibility of applying new rules compared to most ad-hoc software approaches in this field. Furthermore, it is flexible enough to incorporate new job scheduling rules into the existing rule set. Experimental results show that this control framework with adaptive rescheduling outperforms fixed job scheduling algorithms.

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참고문헌

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