대한기계학회논문집B (Transactions of the Korean Society of Mechanical Engineers B)

  • 제34권2호
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  • Pages.105-111
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  • 2010
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  • 1226-4881(pISSN)
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  • 2288-5324(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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단위전류당 고유량 유기용매 이송을 위한 다공성 실리콘막 전기침투 펌프의 개발

Development of Porous Silicon Electro-osmotic Pumps for High Flow Rate Per Current Flow Delivery of Organic Solvents

  • 발행 : 2010.02.01
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초록

양극산화법과 DRIE 법으로 제작된 다공성 실리콘막을 이용하여 두 종류의 전기침투 펌프를 제작하였다. 펌프의 성능은 유기용매를 이용하여 유량과 단위전류당 유량으로 측정하였다. 두 종류 펌프 모두 기존의 다공성 유리막으로 제작된 전기침투 펌프보다 성능이 우월했다. 특히 DRIE 법으로 제작된 다공성 실리콘막은 유량과 단위전류당 유량이 모두 월등한 성능을 보였다. DRIE 법은 널리 알려진 방법이기에 이와 같이 제작된 펌프는 다양한 응용 분야에 비교적 쉽게 적용될 것으로 기대된다.

Two types of electro-osmotic pumps were prepared: with anodized and DRIE porous silicon. The pump performance was characterized for both types in terms of flow rate and flow rate per current using organic solvents. Both types of electro-osmotic pumps showed a better performance compared to porous glass electro-osmotic pumps. The DRIE porous silicon electro-osmotic pump especially demonstrated an excellent flow rate and flow rate per current performance. The DRIE porous silicon electro-osmotic pump is expected to help in the development of electro-osmotic pumps and micropumps in general due to the recently widespread availability of DRIE processes.

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참고문헌

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피인용 문헌

  1. Comparison of Electro-Osmotic Pumps with Two Different Types of Porous Glass Frits vol.35, pp.4, 2011, https://doi.org/10.3795/KSME-B.2011.35.4.379