• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.2
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• pp.105-111
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• 2010

Two types of electro-osmotic pumps were prepared: with anodized and DRIE porous silicon. The pump performance was characterized for both types in terms of flow rate and flow rate per current using organic solvents. Both types of electro-osmotic pumps showed a better performance compared to porous glass electro-osmotic pumps. The DRIE porous silicon electro-osmotic pump especially demonstrated an excellent flow rate and flow rate per current performance. The DRIE porous silicon electro-osmotic pump is expected to help in the development of electro-osmotic pumps and micropumps in general due to the recently widespread availability of DRIE processes.