Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지
DOI QR코드

DOI QR Code

A Piezo-driven Fine Manipulation System Based on Flexure Hinges for Manipulating Micro Parts

미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니플레이션 시스템

  • 최기봉 (한국기계연구원 나노융합기계연구본부) ;
  • 이재종 (한국기계연구원 나노융합기계연구본부) ;
  • 김기홍 (한국기계연구원 나노융합기계연구본부) ;
  • 고국원 (선문대학교 정보통신공학과)
  • Published : 2009.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

Keywords

References

  1. K-B. Choi and D. H. Kim, 'A Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion,' Review of Scientific Instruments, vol. 77, no. 6, pp. 0651061-0651067, 2006
  2. D. Zhang, C. Chang, T. Ono, and M. Esashi 'A piezodriven XYmicrostage for multiprobe nanorecording,' Sensors and Actuators A: Physical, vol. 108. no. 1-3, pp. 230-133, 2003 https://doi.org/10.1016/S0924-4247(03)00373-X
  3. Y. Tian, B. Shrinzadeh, and D. Zhang, 'A flexure-based five-bar mechanism for micro/nano manipulation,' Sensors and ActuatorsA: Physical, vol. 153, no. 1, pp. 96-104, 2009 https://doi.org/10.1016/j.sna.2009.04.022
  4. D. Kang, K. Kim, D. Kim, J. Shim, D.-G Gweon, and J. Jeong, 'Optimal design of high precision XY-scanner with nanometerlevel resolution and millimeter-level working range,' Mecluttronics, vol. 19, no. 4, pp. 562-570,2009
  5. M. N. M. Zubir, B. Shirinzadeh, and Y. Tian, 'Developmentofa novel flexure-based microgripper for high precision microobject manipulation,' Sensors and Actuators A: Physical, vol. 150,no.2,pp.257-266,2009 https://doi.org/10.1016/j.sna.2009.01.016
  6. S. T. Smith, Flexures: Elements of Elastic Meclutnisms, Gordon and Breach Science Pub., 2000
  7. N. Lobontiu, Compliant Meclutnisms: Design of Flexure Hinges, CRC Press LLC, 2003
  8. J. H. Kim, S. H. Kim, and Y. K. Kwak, 'Development of a piezoelectric actuator using a three-dimensional bridge-typemechanism,' Review of Scientific Instruments, vol. 74, no. 5, pp. 2918-2924,2006 https://doi.org/10.1063/1.1569411
  9. J. H. Kim, S. H. Kim, and Y. K. Kwak, 'Development and optimization of 3-D bridge-type hinge mechanisms,' Sensors andActuators A, vol. 116, pp. 530-538, 2004 https://doi.org/10.1016/j.sna.2004.05.027
  10. H.-W. Ma, S.-M. Yao, L.-Q. Wang, and Z. Zhong, 'Analysis ofthe displacement amplification ratio of a bridge-type flexure hinge,' Sensors and Actuators A, vol. 132, pp. 730-736, 2006 https://doi.org/10.1016/j.sna.2005.12.028