References
- A. Kulkarni, T. Lim, M. Khan, and K. Schilz, 'Electrical, optical, structura properties of indium-tin-oxide thin films deposited on PET substrates by rf sputtering', J. Vac. Sci. Technol., Vol. A16, p. 1636, 1998 https://doi.org/10.1116/1.581133
- T. karasawa and Y. Miyata, 'Electrical and optical properties of ITO thin films deposited on unheated substrates by dc reactive sputtering', Thin Solid Films, Vol. 223, p. 135, 1997 https://doi.org/10.1016/0040-6090(93)90737-A
- P. Lippens, et al, Thin Solid Films, Vol. 317, p. 405, 1998 https://doi.org/10.1016/S0040-6090(97)00632-9
- 조범진, 김경환, 'PC 기판상에 제작된 ITO 박막의 특성', 전기전자재료학회논문지, 20권, 2호, p. 162, 2007 https://doi.org/10.4313/JKEM.2007.20.2.162
- W. Wu and B. Chiou, 'Deposition of indium thi oxide films on polycarbonate substrates by radio-frequency magnetron sputtering', Thin Solid Films, Vol. 298, p. 221, 1997 https://doi.org/10.1016/S0040-6090(96)09311-X
- T. Minami, H Sonohahra, T. Kakumu, and S. Takata, 'Physics of very thin ITO conducting films with high transparency prepared by dc magnetron sputtering', Thin Solid Films, Vol. 270, p. 37, 1995 https://doi.org/10.1016/0040-6090(95)06889-9
- N. Danson, I. Safi, G. Hall, and R. Howson, 'Techniques for the sputtering of optimum indium-tin-oxide films on to room-temperature substrates', Surf. Coatings Technol., Vol. 99, p. 214, 1998 https://doi.org/10.1016/S0257-8972(97)00436-2