Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Improved hydrogen sensing characteristics of flat type catalytic combustible hydrogen gas sensor of micro-structure

평판형 접촉연소식 마이크로 수소센서의 감지특성 향상

  • Published : 2009.05.31
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Abstract

Flat type catalytic combustible hydrogen sensors were fabricated using platinum micro-heaters and sensing material pastes. The platinum micro-heater was formed on an alumina substrate by sputtering method. The paste for the sensing materials was prepared using ${\gamma}-Al_2O_3$ 30 wt%, $SnO_2$ 35 wt%, and Pd/Pt 30 wt% and coated on the platinum micro-heater. The sensing performances were tested for the prepared sensors with different substrate sizes. The micro catalytic combustible hydrogen sensors showed quick response time, high reliability, and good selectivity against various gases(CO, $C_3H_8,\;CH_4$) at low operating temperature of $156^{\circ}\C$.

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References

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