나노 구조를 갖는 다공성 실리콘의 광 발광성을 이용한 광학이미지 칩의 제작

Fabrication of Optically Images Using Nanostructured Photoluminescenct Porous Silicon

  • 정대혁 (한국과학기술연구원 유기규소화학 실험실)
  • Jung, Daehyuk (Organosilicon Chemistry Laboratory, Korea Institute of Science and Technology)
  • 투고 : 2009.09.09
  • 심사 : 2009.09.21
  • 발행 : 2009.09.30

초록

Optical images based on the porous silicon exhibiting photoluminescence have been prepared from an electrochemical etching of n-type silicon wafer (boron-doped,<100> orientation, resistivity $1{\sim}10{\Omega}-cm$) by using a beam projector. The images remained in the substrate displayed an optical images correlating to the optical pattern and could be useful for optical data storage. This provides the ability to fabricate complex optical encoding in the surface of silicon.

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