Smart Structures and Systems

  • 제5권3호
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  • Pages.279-290
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  • 2009
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  • 1738-1584(pISSN)
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  • 1738-1991(eISSN)
테크노프레스 (Techno-Press)
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DOI QR코드

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Microcontroller based split mass resonant sensor for absolute and differential sensing

  • Uma, G. (Department of Instrumentation and Control Engineering, National Institute of Technology) ;
  • Umapathy, M. (Department of Instrumentation and Control Engineering, National Institute of Technology) ;
  • Kumar, K. Suneel (Department of Instrumentation and Control Engineering, National Institute of Technology) ;
  • Suresh, K. (Department of Instrumentation and Control Engineering, National Institute of Technology) ;
  • Josephine, A. Maria (Department of Instrumentation and Control Engineering, National Institute of Technology)
  • 투고 : 2008.06.14
  • 심사 : 2008.10.29
  • 발행 : 2009.05.25
⟨ 이전 논문 다음 논문 ⟩

초록

Two degrees of freedom resonant systems are employed to improve the resonant property of resonant sensor, as compared to a single degree of freedom resonant system. This paper presents design, development and testing of two degrees of freedom resonant sensor. To measure absolute mass, cantilever shaped two different masses (smaller/absorber mass and bigger/drive mass) with identical resonant frequency are mechanically linked to form 2 - Degree-of-Freedom (DOF) resonator which exhibits higher amplitude of displacement at the smaller mass. The same concept is extended for measuring differential quantity, by having two bigger mass and one smaller mass. The main features of this work are the 3 - DOF resonator for differential detection and the microcontroller based closed loop electronics for resonant sensor with piezoelectric sensing and excitation. The advantage of using microcontroller is that the method can be easily extended for any range of measurand.

키워드

참고문헌

  1. Hahimoto, M., Cabuz, C., Minani, K. and Esashi, M. (1995), "Silicon Resonant angular rate sensor using electromagnetic excitation and capacitive detection", J. Micromech. Microeng., 5, 219-225. https://doi.org/10.1088/0960-1317/5/3/003
  2. Li, X., Lin, R. and Leow, K.W. (2000), "Performance-enhanced micro-machined resonant systems with two degrees of freedom resonators", J. Micromech. Microeng., 10, 534-539. https://doi.org/10.1088/0960-1317/10/4/308
  3. Li, X., Ono, T., Lin, R. and Esashi, M. (2003), "Resonance enchancement of micromachined resonators with strong mechanical coupling between two degrees of freedom", Microel. Eng., 65, 1-12. https://doi.org/10.1016/S0167-9317(02)00595-6
  4. Stemme, G. (1991), "Resonant silicon sensors", J. Micromech. Microeng., 1, 113-125. https://doi.org/10.1088/0960-1317/1/2/004
  5. Uma, G., Umapathy, M. and Meenatchisundaram, S. (2007), "Dynamic simulation of micro resonator based differential pressure sensor", Proc. of SPIE Int. Conf. on Smart Structures and Materials, San Diego, USA, April, 6528.

피인용 문헌

  1. Performance enhanced piezo actuated resonant liquid pumping system with two degree of freedom (2-DOF) resonators vol.236, 2015, https://doi.org/10.1016/j.sna.2015.10.025
  2. Higher resonant mode effect on the performance of piezo actuated 2-DOF rectangular cantilever shaped resonators (2-DOF RCR) for liquid viscosity and density sensing vol.23, pp.7, 2017, https://doi.org/10.1007/s00542-016-3061-6
  3. A structural tailored piezo actuated cantilever shaped 2-DOF resonators for viscosity and density sensing in liquids vol.247, 2016, https://doi.org/10.1016/j.sna.2016.05.052