Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Micro toluene gas sensor of SWNTs-PtOx system using the vacuum filtering deposition method

진공여과증착법을 이용한 SWNT-PtOx계 마이크로 톨루엔 가스센서

  • 김일진 (대덕대학교 군사학부) ;
  • 전영집 (대덕대학교 군사학부) ;
  • 최창규 (대덕대학교 군사학부) ;
  • 이영욱 (호원대학교 지상무기학) ;
  • 최시영 (호원대학교 지상무기학) ;
  • 한창수 (한국기계연구원 나노기계시스템연구센터) ;
  • 한상도 (한국에너지기술연구원 광.전기소재연구센터)
  • Published : 2009.03.31
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Abstract

Toluene($C_6H_5CH_3$) gas sensors were fabricated using $PtO_x$ loaded with SWNTs by a new deposition method. The nanoparticle powders of SWNTs-$PtO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against toluene gas which is a kind of the Volatile Organic Compounds. The composition ratio that exhibited the highest response to toluene gases was SWNTs : $PtO_x\;=\;99:1$ in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times of the sensors were as short as less than 1 min., respectively.

Keywords

References

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