센서학회지 (Journal of Sensor Science and Technology)

  • 제18권2호
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  • Pages.135-138
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  • 2009
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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Hg1-xCdxTe를 이용한 64x1 선형 적외선 감지 소자 제작

Fabrication of 64x1 linear array infrared detector using Hg1-xCdxTe

  • 김진상 (한국과학기술연구원 박막재료연구센터) ;
  • 서상희 (한국과학기술연구원 나노소재기술개발사업단)
  • Kim, Jin-Sang (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
  • Suh, Sang-Hee (Center for Nanostructured Materials Technology, Korea Institute of Science and Technology)
  • 발행 : 2009.03.31
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초록

$64{\times}1$ forcal plane infrared detector has been fabricated by using HgCdTe epi layer. HgCdTe was grown on GaAs substrate by using metal organic chemical vapor deposition. This paper describes key developments in the epi layer growth and device fabrication process. The performance of IR imaging system is summarized.

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참고문헌

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