Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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DRIE Technology for TSV Fabrication

TSV 형성을 위한 DRIE 기술

  • 백규하 (한국전자통신연구원 RFID/USN 연구부) ;
  • 김동표 (한국전자통신연구원 RFID/USN 연구부) ;
  • 박건석 (한국전자통신연구원 RFID/USN 연구부) ;
  • 강진영 (한국전자통신연구원 RFID/USN 연구부) ;
  • 이기준 (충남대학교 전자공학과) ;
  • 도이미 (한국전자통신연구원 RFID/USN 연구부)
  • Published : 2009.12.01
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References

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