Bulletin of the Korean Chemical Society

  • 제30권1호
  • /
  • Pages.201-204
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  • 2009
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  • 0253-2964(pISSN)
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  • 1229-5949(eISSN)
대한화학회 (Korean Chemical Society)
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Properties of MTiO3 (M = Sr, Ba) and PbM'O3(M'= Ti, Zr) Superlattice Thin Films Fabricated by Laser Ablation

  • Lim, T.M. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University) ;
  • Park, J.Y. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University) ;
  • Han, J.S. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University) ;
  • Hwang, P.G. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University) ;
  • Lee, K.H. (Nanoscale Science and Technology Institute, Wonkwang University) ;
  • Jung, K.W. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University) ;
  • Jung, D. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
  • 발행 : 2009.01.20
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초록

$BaTiO_3/SrTiO_3$ and $PbTiO_3/PbZrO_3$ superlattice thin films were fabricated on $Pt/Ti/SiO_2/Si$ substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superlattice structure. The dielectric constant of $BaTiO_3/SrTiO_3$ superlattice thin film was higher than that of individual $BaTiO_3$ or $SrTiO_3$ film. Same result was obtained in the $PbTiO_3/PbZrO_3$system. The dielectric constant of a superlattice film was getting higher as the number of layer is increased.

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