Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 15 Issue 3
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- Pages.41-46
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- 2008
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
A Study on Etching of $EAGLE^{2000TM}$ LCD Glass by HF-HCl Mixed Solutions
HF-HCl 혼합 용액에서 $EAGLE^{2000TM}$ LCD 유리의 식각에 관한 연구
- Byun, Ji-Young (Korea Institute of Science and Technology)
- 변지영 (한국과학기술연구원 기능금속연구센터)
- Published : 2008.09.30
Abstract
Etching kinetics of
본 연구는 2.5MHF-xMHCl