Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Dimensional Stability of an Imprinted Microoptic Waveguide

임프린트 기반 마이크로 광도파로의 변형 특성 연구

  • Ryu, Jin-Hwa (College of Nano science and technology, Pusan National Univ.) ;
  • Kim, Chang-Seok (College of Nano science and technology, Pusan National Univ.) ;
  • Jeong, Myung-Yung (College of Nano science and technology, Pusan National Univ.)
  • 류진화 (부산대학교 나노과학기술대학) ;
  • 김창석 (부산대학교 나노과학기술대학) ;
  • 정명영 (부산대학교 나노과학기술대학)
  • Published : 2008.11.01
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Abstract

We have studied the characteristic changes of optical device using imprint lithography. An imprinted structure is inherently involved in residual stress due to the temperature and the pressure cycle during fabrication process. A structure with residual stress undergoes stress relaxation, which leads io dimensional change. Therefore, annealing processes was performed to reduce the residual stress of imprinted polymer channel. Reduction of residual stress was confirmed through dimensional change, birefringence, and the mechanical properties. We have fabricated an optical device, and it saw the optical intensity changes within 0.1% for 1 month.

Keywords

References

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