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40kV용 투과양극형 x-ray tube에 의한 X-ray 형광 특성

Characteristics of the X-ray Fluorescence by the 40kV transmission anode x-ray tube

  • 발행 : 2008.05.30

초록

휴대용 XRF(X-Ray Fluorescence) 장치에 적용하기 위하여 개발한 투과 양극형 x-ray tube를 이용하여 XRF 실험을 하고, x-ray tube가 XRF data에 미치는 영향을 조사하였다. W-target tube와 Rh-target tube를 이용하여 측정한 XRF data는 알려진 결과와 잘 일치하였다. 35 kV와 관전압과 $40{\mu}A$의 관전류에서 W-target tube로 측정한 Fe $K_{\alpha}$-line의 FWHM은 약 180 eV로써, 이 값은 물질의 성분분석을 하기에 충분한 것으로 확인하였다. XRF data와 x-ray tube의 적분강도 곡선을 비교 분석해 본 결과, 휴대용 XRF 장치에는 W-Target tube보다는 Rh-Target tube를 사용하는 것이 더 유리함을 밝혀내었다.

By using the transmission anode x-ray tube developed to apply to the hand-held XRF equipment, we carried out XRF experiment and evaluated the influences of the x-ray tube on XRF spectra. XRF data, which is measured using the W-target and Rh-target tube, were good agreements with the known results. FWHM of Fe $K_{\alpha}$-line measured by W-target tube with the 35 kV-tube voltage and the $40{\mu}A$-tube current was 180 eV. This result reveals that our XRF equipment using the transmission anode x-ray tube is enough for a qualitative analysis of materials. By comparison XRF data with the integrated intensity of x-ray tube, it was confirmed that Rh-target tube is better than W-target tube for application to the hand-held XRF equipment.

키워드

참고문헌

  1. United States Patent 4,034,251 July 5, 1977
  2. Comprehensive Analytical Chemistry, Volume XXIV G.Svehla 1989 ELSEVIER p70
  3. S. S. Kim, D. Y. Kim, J. Kor. Vac. Soc. 16, 305 (2007) https://doi.org/10.5757/JKVS.2007.16.4.305
  4. S. S. Kim, D. Y. Kim, J. Kor. Vac. Soc. to be published
  5. S. S. Kim, D. Y. Kim, J. Kor. Vac. Soc. submitted
  6. Comprehensive Analytical Chemistry, Volume XXIV G.Svehla 1989 ELSEVIER p.24

피인용 문헌

  1. Computer Simulation for Development of Micro-Focus X-ray Generator vol.20, pp.6, 2011, https://doi.org/10.5757/JKVS.2011.20.6.403
  2. Study for Enhancement of the Detection Sensitivity in Hand-Held X-Ray Fluorescence Device vol.20, pp.6, 2011, https://doi.org/10.5757/JKVS.2011.20.6.409