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Selection of Heater Location in Linear Source for OLED Vapor Deposition

OLED 증착을 위한 선형증발원 히터 위치선정

  • 주영철 (순천향대학교 기계공학과) ;
  • 한충환 (순천향대학교 기계공학과) ;
  • 엄태준 (순천향대학교 기계공학과) ;
  • 이상욱 (순천향대학교 기계공학과) ;
  • 김국원 (순천향대학교 기계공학과) ;
  • 권계시 (순천향대학교 기계공학과)
  • Published : 2008.06.01

Abstract

Organic light emitting diode(OLED) is one of the most promising type of future flat panel display. A linear source is used to deposite organic vapor to a large size OLED substrate. An electric heater which is attached on the side of linear source heats the organic powder for the sublimation. The nozzle of heater, which is attached at the top of the linear source has an optimal temperature. An numerical analysis has been performed to find optimal heater position for the optimal nozzle temperature. A commercial CFD program, FLUENT, is used on the analysis. Two-dimensional and three-dimensional analysis have been performed. The analysis showed that the heater should be attached at the outer side of crucible wall rather than inner side of housing, which was original design. Eighteen milimeter from the top of the linear source was suggested as the optimal position of heater. Improving thermal performance of linear source not only helps the uniformity of organic vapor deposition on the substrate but also increase productibity of vapor deposition process.

Keywords

References

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