Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Phase Peak Ambiguity According to Illumination in White-Light Phase-Shifting Interferometry

백색광 간섭계의 위상 정점 알고리즘에서 조명에 따른 위상 정점 모호성에 관한 연구

  • 김기홍 (한국기계연구원 나노기계연구본부) ;
  • 이형석 ((주)나노시스템)
  • Published : 2008.01.01
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Abstract

White light scanning interferometry has gotten a firm position in 3D surface profile measuring field. Recently, the LCD industry gave a chance for this technology to enter into real industry fields. It is known that white-light phase-shifting algorithm give a best resolution compare to other algorithms, but there are some problems to be resolved. One of them is 300nm jump in height profile, called bat-wing effect. The main reason of this problem is an ambiguity of phase-peak detection algorithm, and some solution has been proposed, but it didn't work perfectly. In this paper, I will show the cases when these effects are occurred, and these height discrepancies will be almost disappeared when broad-band illuminators are used.

Keywords

References

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