Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Synthesis of Novel Platinum Precursor and Its Application to Metal Organic Chemical Vapor Deposition of Platinum Thin Films

  • Lee, Sun-Sook (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Lee, Ho-Min (Department of Materials Science and Engineering, Korea University) ;
  • Park, Min-Jung (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • An, Ki-Seok (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Jin-Kwon (Department of Chemistry, Gongju National University) ;
  • Lee, Jong-Heun (Department of Materials Science and Engineering, Korea University) ;
  • Chung, Taek-Mo (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Chang-Gyoun (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • Published : 2008.08.20
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Abstract

A novel platinum aminoalkoxide complex, Pt$(dmamp)_2$ has been prepared by the reaction of cis-$(py)_2PtI_2$ with two equivalents of Na(dmamp) (dmamp = 1-dimethylamino-2-methyl-2-propanolate). Single-crystal X-ray crystallographic analysis shows that the Pt(dmamp)2 complex keeps a square planar geometry with each two nitrogen atoms and two oxygen atoms having trans configuration. Platinum films have been deposited on TaN/ Ta/Si substrates by metal organic chemical vapor deposition (MOCVD) using Pt$(dmamp)_2$. As-deposited platinum thin films did not contain any appreciable amounts of impurities except a little carbon. As the deposition temperature was increased, the films resistivity and deposition rate increased. The electrical resistivity (13.6 $\mu\Omega$cm) of Pt film deposited at 400 ${^{\circ}C}$ is a little higher than the bulk value (10.5 $\mu\Omega$cm) at 293 K. The chemical composition, crystalline structure, and morphology of the deposited films were investigated by X-ray photoelectron spectroscopy, X-ray diffraction, and atomic force microscopy.

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